Abstract
In the course of the rapid development of new laser systems and modern optics, optical coating technology is challenged by ever increasing quality requirements. For example, many of current laser applications in material processing, medicine, or fundamental research are dependent on optical components with low losses, high laser induced damage thresholds, and a high stability in respect to environmental influences. Besides innovative applications of fs-lasers, semiconductor lithography can be considered as one of the major pace makers for optical thin film technology which pushes the wavelength to lower limits in the UV/VUV- and even the EUV-spectral range and defines new specifications in respect to life time and contamination of optical coatings. Not least, complex spectral transfer functions have to be fulfilled by optical coatings in the emerging fields of telecommunication and applications of modern optics in precision metrology.
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Ristau, D. (2003). Characterisation and Monitoring. In: Kaiser, N., Pulker, H.K. (eds) Optical Interference Coatings. Springer Series in Optical Sciences, vol 88. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-36386-6_8
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DOI: https://doi.org/10.1007/978-3-540-36386-6_8
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