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Micromachining Technology

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Book cover MEMS: A Practical Guide to Design, Analysis, and Applications

Abstract

The term micromachining usually refers to the fabrication of micromechanical structures with the aid of etching techniques to remove part of the substrate or a thin film. Silicon has excellent mechanical properties,[1] making it an ideal material for machining. An early silicon (pressure) sensor was made by Honeywell in 1962 using isotropic etching.[2] In 1966, Honeywell developed a technique to fabricate thin membranes using mechanical milling. Crystal-orientation-dependent etchants led to more precise definition of structures and increased interest.[3] Anisotropic etching was introduced in 1976. An early silicon pressure sensor, based on anisotropic etching, was made by Greenwood in 1984.[4] Surface micromachining also dates back to the 1960s. Early examples included metal mechanical layers.[5] Basically, surface micromachining involves the formation of mechanical structures from thin films on the surface of the wafer. The 1980s saw the growth of silicon-based surface micromachining using a polysilicon mechanical layer.[6,7] In recent years, a number of new technologies have been developed using both silicon and alternative materials. These include the epi-processes where the epilayer is used as a mechanical layer and a number of deep plasma etching processes. This chapter concentrates on silicon-based micromachining processes.

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  1. Delft University of Technology, The Netherlands

    Paddy J. French & Pasqualina M. Sarro

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  2. Pasqualina M. Sarro
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  1. Institute for Microsystem Technology IMTEK, University of Freiburg, Freiburg, Germany

    Jan G. Korvink  & Oliver Paul  & 

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© 2006 William Andrew, Inc.

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French, P.J., Sarro, P.M. (2006). Micromachining Technology. In: Korvink, J.G., Paul, O. (eds) MEMS: A Practical Guide to Design, Analysis, and Applications. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-33655-6_15

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  • DOI: https://doi.org/10.1007/978-3-540-33655-6_15

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-21117-4

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