Abstract
Micromachining technologies have enabled a reduction in the size of mechanical sensors and an increase in their functionality to unprecedented levels of miniaturization. In many applications, precision-machined devices already existed when micromachined solutions entered the market. To replace established solutions, mechanical microsensors had to prove their competitiveness with respect to cost, size, and performance. Success stories were due to enhanced functionality, increased accuracy and performance, and higher reliability, at lower device, packaging, and mounting costs. In many applications, such as the automotive area, which was and still remains the strongest driver for MEMS-based sensor sys- tems, sensor cost is one of the most important factors deciding the success and the degree of market penetration of a new system. Starting with the replacement of older sensor generations established in already-existing systems like the airbag, mainly for cost reasons, mechanical microsensors are currently enabling completely new systems that critically rely on them. One well-known example is the Electronic Stability Program (ESP) or Vehicle Dynamics Control (VDC) system, which would not have been affordable and would not have reached today’s performance if it had to rely on classical mechanical sensor approaches.
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Laermer, F. (2006). Mechanical Microsensors. In: Korvink, J.G., Paul, O. (eds) MEMS: A Practical Guide to Design, Analysis, and Applications. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-33655-6_10
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DOI: https://doi.org/10.1007/978-3-540-33655-6_10
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