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© 2007 Springer-Verlag Berlin Heidelberg
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(2007). Tip Deflection Measurement — Capacitive Sensor Principle. In: Piezoelectric Multilayer Beam Bending Actuators. Microtechnology and Mems. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-32642-7_11
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DOI: https://doi.org/10.1007/978-3-540-32642-7_11
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-32641-0
Online ISBN: 978-3-540-32642-7
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