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Vakuummeßgeräte und Lecksuchgeräte

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Handbuch Vakuumtechnik

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Zusammenfassung

Man unterscheidet Vakuummeßgeräte zum Messen des Totaldrucks (Abschnitt 11.2 bis 11.5) und solche zum Messen der Partialdrücke in Gasgemischen (Abschnitt 11.6). Aus der großen Vielfalt der Arten sind in Kapitel 11 nur die praktisch wichtigsten behandelt; ergänzend wird auf die zusammenfassenden Berichte [63, 68, 69, 70, 71, 72, 73, 74, 75, 75a, 76] hingewiesen. Die Lecksuchgeräte in Abschnitt 11.7 sind massenspektrometrische Partiialdruckmeßgeräte. Sie werden daher in Kap. 11 behandelt, während die Lecksuchverfahren Kapitel 12 vorbehalten sind.

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Authors
  1. Max Wutz
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  2. Hermann Adam
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  3. Wilhelm Walcher
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  4. Karl Jousten
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Wutz, M., Adam, H., Walcher, W., Jousten, K. (2000). Vakuummeßgeräte und Lecksuchgeräte. In: Handbuch Vakuumtechnik. Vieweg+Teubner Verlag, Wiesbaden. https://doi.org/10.1007/978-3-322-99947-4_11

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