Skip to main content
SpringerLink
Log in
Book cover

Wutz Handbuch Vakuumtechnik pp 554–596Cite as

Kalibrierungen und Normen

  • Chapter

  • 1514 Accesses

Zusammenfassung

In diesem Kapitel erfahren Sie, wie Vakuummessgeräte kalibriert werden, was geeignete Primär- und Sekundärnormale für Vakuumdrücke sind, und wie Saugvermögensmessungen von Vakuumpumpen durchgeführt werden.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   54.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Literaturverzeichnis

  1. K. Jousten and P. Röhl, Instability of the spatial electron current distribution in hot cathode ionization gauges as a source of sensitivity changes, J. Vac. Sci. Technol. A 13 (1995), 2266 ... 2270.

    Article  ADS  Google Scholar 

  2. Internationales Wörterbuch der Metrologie, Hrsg.: DIN, Beuth Verlag, Berlin, 1994.

    Google Scholar 

  3. G. Messer, PTB Jahresbericht 1975, 280.

    Google Scholar 

  4. K.F. Poulter, A. Calcatelli, P. S. Choumoff, B. Iapteff, G. Messer, and G. Grosse, J. Vac. Sci. Technol. 17 (1980), 679.

    Article  ADS  Google Scholar 

  5. G. Messer, W. Jitschin, L. Rubet, A. Calcatelli, F. J. Redgrave, A. Keprt, F. Weinan, J. K. N. Sharma, S. Din-mann, and M. Ono, Metrologia 26 (1989), 183.

    Article  ADS  Google Scholar 

  6. J. K. N. Sharma, p. Mohan, W. Jitschin, and P. Röhl, J. Vac. Sci. Technol. A 7 (1989), 2788.

    Google Scholar 

  7. L. Wangkui, Liu Quiang, Li Zhenhai, G. Messer, and G. Grosse, Vacuum 43 (1992), 1091.

    Article  Google Scholar 

  8. K. Jousten, A. R. Filipelli, C. R. Tilford, and F. J. Redgrave, Comparison of the standards for high and ultrahigh vacuum at three national standards laboratories, J. Vac. Sci. Technol. A 15 (1997), 2395 ... 2406.

    Article  ADS  Google Scholar 

  9. A. Müller, Metrologia, Final report on key comparison CCM.P-K4 of absolute pressure standards from 1 Pa to 1000 Pa,Metrologia 39 (2002), Techn. Suppl., 07001.

    Google Scholar 

  10. H. Adametz, M. Wloka, Metrologia, 28 (1991), 333 ... 337.

    Article  ADS  Google Scholar 

  11. K.-D. Sommer, J. Poziemski, Metrologia, 30 (1993/94), 665 ... 668.

    Google Scholar 

  12. S. J. Bennet, P. B. Clapham, J. E. Dadson and D. I. Simpson, Laser interferometry applied to mercury surfaces,J. Phys. E: Sci. Instr. 8 (1975), 5 ... 7.

    Article  ADS  Google Scholar 

  13. J. Jäger, Use of a precision mercury manometer with capacitance sensing of menisci,Metrologia 1993/94, 30, 553 ... 558.

    Google Scholar 

  14. H. Bauer, Die Darstellung der Druckskala im Bereich von 0,01 bar bis 2 bar durch das Quecksilbernormalmanometer der PTB,PTB-Mitteilungen 89 (1979), 248 ... 255.

    Google Scholar 

  15. P. L. Heydemann, A fringe-counting pulsed ultrasonic interferometer,Rev. Sci. Instr. 42 (1971), 983 ... 986.

    Article  ADS  Google Scholar 

  16. C. R. Tilford, The speed of sound in a mercury ultrasonic interferometer manometer,Metrologia 24 (1987), 121 ... 131.

    Google Scholar 

  17. W. Gaede, Ann. Phys 46 (1915), 357.

    Article  Google Scholar 

  18. H. Ishi and K. Nakayama, 8 AVS Nat. Vac. Symp, 1962, 519.

    Google Scholar 

  19. Chr. Meinke und G. Reich, Vacuum 13 (1963), 579 ... 581.

    Google Scholar 

  20. G. Klingenberg und F. Lüdicke, PTB-Mitteilungen 101 (1991), 7 ... 18.

    Google Scholar 

  21. C. R.Tilford, R. W. Hyland, and Y. T. Sheng, Yi-Tang, BIPM, Bureau International des Poids et Mesures Monogr. 89/1 (1989), 105 ... 113.

    Google Scholar 

  22. Rosenberg, Rendle, Metrologia…

    Google Scholar 

  23. M. Knudsen, Ann. Phys. (Leipzig) 31 (1910), 633.

    ADS  MATH  Google Scholar 

  24. J. M. Lafferty, Foundations of Vacuum Science and Technology, John Wiley & Sons, New York, 1998, S. 383.

    Google Scholar 

  25. S. Schuman, Trans. Natl. Vac. Symp. 9 (1962), 463.

    Google Scholar 

  26. M. Bergoglio, A. Calcatelli, L. Mazzola, and G. Rumanio, Vacuum 38 (1988), 887.

    Article  Google Scholar 

  27. W. Jitschin, J.K. Migwi, and G. Grosse, Presures in the high and medium vacuum range generated by a series expansion standard, Vacuum 40 (1990), 293 ... 304.

    Google Scholar 

  28. K. Jousten, V. Aranda Contreras, and P.Röhl, Volume ratio determination in static expansion systems by means of a spinning rotor gauge, Vacuum 52 (1999), 491 ... 499.

    Google Scholar 

  29. K. W. T. Elliott and P. B. Clapham, NPL Report MOM 28 (1978).

    Google Scholar 

  30. A. Berman and J. K. Fremerey, J. Vac. Sci. Technol. A 5 (1987), 2436 ... 2439.

    Article  ADS  Google Scholar 

  31. G. N. Peggs, Vacuum 26 (1976), 321.

    Article  Google Scholar 

  32. H. G. Bennewitz und H. D. Dohmann, Vak. Tech. 14 (1965), 8.

    Google Scholar 

  33. K. Jousten, G. Messer, and D. Wandrey, A precision gas flowmeter for vacuum metrology, Vacuum 44 (1993), 135 ... 141.

    Google Scholar 

  34. DIN 28416, März 1976, Kalibrieren von Vakuummetern im Bereich von 10 -3 bis 10 mbar, Beuth Verlag, Berlin.

    Google Scholar 

  35. P. Szwemin, K. Szymansky, and K. Jousten, Metrologia (2000).

    Google Scholar 

  36. G. Grosse and G. Messer, Vacuum 20 (1970), 373 ... 376.

    Article  Google Scholar 

  37. K. F. Poulter, Vacuum 28 (1978), 135.

    Article  Google Scholar 

  38. W. Liepmann, J. Fluid Mech. 10 (1961), 65.

    Article  MathSciNet  ADS  MATH  Google Scholar 

  39. J. K. N. Sharma, P. Mohan, and D. R.Sharma, J. Vac. Sci. Tachnol. A 8 (1990), 941.

    Article  ADS  Google Scholar 

  40. J. P. Looney, NIST, pers. Mitteilung.

    Google Scholar 

  41. K. Jousten, Temperature corrections for the calibration of vacuum gauges, Vacuum 49 (1998), 81 ... 87.

    Article  Google Scholar 

  42. A. Tison and C. R. Tilford, RL/NIST Workshop on Moisture Measurement and Control for Microelectronics (B.A. Moore and J. A. Carpenter, Jr., eds.), NISTIR 5241,NIST, Washington DC (1993), 19 ... 29.

    Google Scholar 

  43. J. R. Roehring and J. C. Simons, Trans. Natl. Vac. Symp. 9 (1962), 511.

    Google Scholar 

  44. F. Feakes and F. L. Torrey, Trans. Natl. Vac. Symp. 10 (1963), 257.

    Google Scholar 

  45. K. Jousten, H. Menzer, R. Niepraschk, A fully automated, primary standard for generating pressures between 10 Pa and 310 Pa with respect to residual pressure, Metrologia (2000).

    Google Scholar 

  46. G. Grosse und G. Messer, Vak. Tech. 30 (1981), 226.

    Google Scholar 

  47. V. V. Kuzmin, Vacuum 46 (1995), 251.

    Article  Google Scholar 

  48. J. P. Looney, Measurement of CO pressures in UHV regime using resonance-enhanced mulitphoton-ionization time-of flight mass spectrosocopy, J. Vac. Sci. Technol. A 11 (1993), 3111 ... 3120.

    Google Scholar 

  49. H. Shimizu, H. Hashizume, S. Ichimura and K. Kokubun, Detection of sputtered neutral atoms by nonresonant multiphoton ionization, Jap. J. of Appl. Phys. 27 (1988), 502 ... 505.

    Google Scholar 

  50. S. Ichimura, K. Kokubun, H. Shimizu, S. Sekine, Possibility and current status of absolute XHV measurement by laser ionization, Vacuum 47 (1996), 545 ... 552.

    Article  Google Scholar 

  51. E. Lanzinger, K. Jousten, M. Kühne, Partial pressure measurement by means of infrared laser absorption spectroscopy, Vacuum 51 (1998), 47 ... 51.

    Google Scholar 

  52. J. T. Hodges, J. P. Looney, and Roger D. van Zee, Response of a ringdown-cavity to an arbitrary excitation,J. Chem Phys. 105 (1996), 10278 ... 10288.

    Google Scholar 

  53. DIN 28418 (1976), Standardverfahren zum Kalibrieren von Vakuummetern durch direkten Vergleich mit einem Bezugsmessgerät, Teile 1 bis 3, Beuth Verlag, Berlin.

    Google Scholar 

  54. Richtlinie DKD-R 6 ... 2, Kalibrierung von Messmitteln far Vakuum,03/2002, Teil 1 Grundlagen,Teil 2 Messunsicherheiten,Teil 3 Elektrische Membranvakuummeter,Teil 4 Ionisations-Vakuummeter,Teil 5 WärmeleitungsVakuummeter,zu beziehen durch DKD, Bundesallee 100, 38116 Braunschweig.

    Google Scholar 

  55. R. W. Hyland and R. L. Shaffer, J. Vac. Sci. Technol. A 9 (1991), 2843.

    Google Scholar 

  56. S. Dittmann, B. Lindenau, and C. R. Tilford, The molecular drag gauge as a calibration standard, J. Vac. Sci. Technol. A 7 (1989), 3356 ... 3360.

    Google Scholar 

  57. G. Messer und P. Röhl, PTB Jahresbericht 1984, 226.

    Google Scholar 

  58. P. Röhl and W. Jitschin, Vacuum 38 (1988), 507.

    Article  Google Scholar 

  59. H. U. Becker and G. Messer, Sensitivity dependence on collector surface properties in ion gauges, Vide Suppl. 201 (1980), 234 ... 237.

    Google Scholar 

  60. G. Grosse, U. Harten, W. Jitschin, H. Gentsch, Secondary electrons in ion gauges, J. Vac. Sci. Technol. A 5 (1987), 3242 ... 3243.

    Google Scholar 

  61. K. Jousten and P. Röhl, Comparison of the sensitivities of ionization gauges to hydrogen and deuterium,Vacuum 46 (1995), 9.. 12.

    Google Scholar 

  62. H. Ave, H. U. Becker, und G. Messer, PTB Mitteilungen 95 (1) (1985), 20.

    Google Scholar 

  63. H. U. Becker and G. Messer, Proc. 5th Int. Vac. Congress/ 9th Int. Conf. on Surface Sscience, Madrid (1983), 84 (unveröffentlicht).

    Google Scholar 

  64. R. Holanda, J. Vac. Sci. Technol. 10 (1973), 1133.

    Google Scholar 

  65. A. Filipelli, AIP Conf. Proc. 171 (1988), 236.

    Google Scholar 

  66. C. R. Tilford, K. E. Mc Culloh, and H. Seung Woong, J. Vac. Sci. Technol. 20 (1982), 1140.

    Google Scholar 

  67. S. D. Wood and C. R. Tilford, J. Vac. Sci. Technol. A 3 (1985), 542.

    Article  ADS  Google Scholar 

  68. A.R. Filipelli and P.J. Abbott, J. Vac. Sci. Technol. A 13 (1995), 2582.

    Google Scholar 

  69. D. Lichtman, J. Vac. Sci. Technol. A 8 (1990), 2810.

    Google Scholar 

  70. L. Lieszkovsky, A. R. Filipelli, and C.R. Tilford, J. Vac. Sci. Technol. A 8 (1990), 3838.

    Article  ADS  Google Scholar 

  71. W. R. Blanchard, P. J. Mc earthy, H. F. Dylla, H. La Marche, and J. E. Simpkins, J. Vac. Sci. Technol. A 4 (1986), 1715.

    Google Scholar 

  72. J. R. Bennet and R. J. Elsey, Vacuum 44 (1993), 647.

    Article  Google Scholar 

  73. J. K. Fremerey, J. Vac. Soc. Jpn. 37 (1994), 718.

    Google Scholar 

  74. Y. Nakashima, K. Tsuchiya, K. Ohtoshi, M. Shoji, K. Yatsu, and T. Tamano, J. Vac. Sci. Technol. A 13 (1995), 2470.

    Google Scholar 

  75. D. J. Santeler, J. Vac. Sci. Technol. A 5 (1987), 129.

    ADS  Google Scholar 

  76. R.E. Ellefson, D. Cain, and C. N. Lindsay, J. Vac. Sci. Technol. A 5 (1987), 129.

    Article  ADS  Google Scholar 

  77. J. A. Basford, N. D. Boeckmann, R E Ellefson, A. R. Filipelli, D. H. Holkeboer, L. Lieszkovsky, and C. M. Stupak, J. Vac. Sci. Technol. A 11 (1993), 22.

    Google Scholar 

  78. G. M. Solomon, J. Vac. Sci. Technol. A 4 (1986), 327.

    ADS  Google Scholar 

  79. C. D. Ehrlich, J. Vac. Sci. Technol. A 4 (1986), 2384.

    Google Scholar 

  80. S. M. Thornberg, J. Vac. Sci. Technol. A 6 (1988), 2522.

    Google Scholar 

  81. E. Fischer and H. Mommsen, Vacuum 17 (1967), 309.

    Article  Google Scholar 

  82. Feng Yu-guo and Xu Ting Wie, Vacuum 30 (1980), 377.

    Article  Google Scholar 

  83. M. H. Hablanian, J. Vac. Sci. Technol. A 5 (1987), 2552.

    Google Scholar 

  84. B. R. F. Kendall, J. Vac. Sci. Technol. A 7 (1989), 2404.

    Google Scholar 

  85. G. Grosse, W. Jitschin, and D. Wandrey, Vacuum 41 (1990), 2120.

    Article  Google Scholar 

  86. K. Terado, T. Okano, and Y. Tuzi, J. Vac. Sci. Technol. A 7 (1989), 2397.

    Google Scholar 

  87. Y. Tuzi, T. Okano, and K. Terano, Vacuum 41 (1990), 2004.

    Article  Google Scholar 

Download references

Authors
  1. Karl Jousten
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Karl Jousten

Rights and permissions

Reprints and permissions

Copyright information

© 2004 Springer Fachmedien Wiesbaden

About this chapter

Cite this chapter

Jousten, K. (2004). Kalibrierungen und Normen. In: Jousten, K. (eds) Wutz Handbuch Vakuumtechnik. Vieweg+Teubner Verlag, Wiesbaden. https://doi.org/10.1007/978-3-322-96971-2_14

Download citation

  • DOI: https://doi.org/10.1007/978-3-322-96971-2_14

  • Publisher Name: Vieweg+Teubner Verlag, Wiesbaden

  • Print ISBN: 978-3-322-96972-9

  • Online ISBN: 978-3-322-96971-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics

Search

Navigation