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Applications of Integrated Optics in the Field of Measuring, Technology and Sensorics

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Part of the TEUBNER-TEXTE zur Physik book series (TTZP)

Abstract

Applications of integrated optics in the measurement technology mainly refer to the area of interferometry, and in this connection first priority is attached to the measurement of optical path. In this case the use of electrooptical materials such as LiNbO3 is especially attractive, as the high frequency modulation of the laser ligth in one of the interferometer arms makes it possible to employ to advantage the very effective heterodyne evaluation equipment and to achieve a resolving power within the range of 10nm.

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References

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    J. Bauer, E. Dammann, E. Fritsch Secound Symposium of Microsystem Technology Februar 1992, RegensburgGoogle Scholar
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    T. Posner, W. Karthe, R. Müller, Exp. Technic of Physics 33 (1985) 3, 241Google Scholar
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    K. Tiefenthaler, W. Lukosz, JOSA D 62 (1989) 209CrossRefGoogle Scholar

Copyright information

© B. G. Teubner Verlagsgesellschaft Leipzig 1993

Authors and Affiliations

  1. 1.Jenoptik GmbHJenaGermany

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