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Force Transducers on the Basis of Piezoelectric Copolymers

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Part of the TEUBNER-TEXTE zur Physik book series (TTZP)

Abstract

This report presents a novel method for the production of force transducers for scanning microscopy using piezoelectric polymers as sensitive materials.

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References

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    Nonnenmacher, M., Rastermikroskopie mit Mikrospitzen, Thesis, Kassel, 1990Google Scholar
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    Nonnenmacher, M., J. Greschner, O. Wolter, R. Kassing, Scanning force microscopy with micromachined silicon sensors, J. Vac. Sci. Technol. B, 2 Mar/Apr1991Google Scholar
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    Wolter, 0., Th. Bayer, J. Greschner, Micromachined silicon sensors for scanning force microscopy, J. Vac. Sci. Technol. B, 2 Mar/Apr1991Google Scholar
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    Rangelow, I. W., R. Kassing, Trockenaetzprozesse in der Mikromechanik, ‘Mikroperipherik’, VDI Verlag, Okt. 1988Google Scholar

Copyright information

© B. G. Teubner Verlagsgesellschaft Leipzig 1993

Authors and Affiliations

  1. 1.Institute of Technical PhysicsUniversity of KasselGermany

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