Micropatterning of Organic-Inorganic Nanocomposites for Micro-Optical Applications

Part of the TEUBNER-TEXTE zur Physik book series (TTZP)


Microoptic elements like gratings and strip waveguides can be produced by different patterning techniques. Organic polymers and inorganic SiO2/TiO2-based sol-gel materials can be used for low-cost mass production of such elements.


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Copyright information

© B. G. Teubner Verlagsgesellschaft Leipzig 1993

Authors and Affiliations

  1. 1.Institut für Neue Materialien gem. GmbHSaarbrückenGermany

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