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Micropatterning of Organic-Inorganic Nanocomposites for Micro-Optical Applications

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Part of the book series: TEUBNER-TEXTE zur Physik ((TTZP))

Abstract

Microoptic elements like gratings and strip waveguides can be produced by different patterning techniques. Organic polymers and inorganic SiO2/TiO2-based sol-gel materials can be used for low-cost mass production of such elements.

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© 1993 B. G. Teubner Verlagsgesellschaft Leipzig

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Krug, H., Merl, N., Schmidt, H. (1993). Micropatterning of Organic-Inorganic Nanocomposites for Micro-Optical Applications. In: Ehrfeld, W., Wegner, G., Karthe, W., Bauer, HD., Moser, H.O. (eds) Integrated Optics and Micro-Optics with Polymers. TEUBNER-TEXTE zur Physik. Vieweg+Teubner Verlag, Wiesbaden. https://doi.org/10.1007/978-3-322-93430-7_14

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  • DOI: https://doi.org/10.1007/978-3-322-93430-7_14

  • Publisher Name: Vieweg+Teubner Verlag, Wiesbaden

  • Print ISBN: 978-3-322-93431-4

  • Online ISBN: 978-3-322-93430-7

  • eBook Packages: Springer Book Archive

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