Abstract
Microoptic elements like gratings and strip waveguides can be produced by different patterning techniques. Organic polymers and inorganic SiO2/TiO2-based sol-gel materials can be used for low-cost mass production of such elements.
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© 1993 B. G. Teubner Verlagsgesellschaft Leipzig
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Krug, H., Merl, N., Schmidt, H. (1993). Micropatterning of Organic-Inorganic Nanocomposites for Micro-Optical Applications. In: Ehrfeld, W., Wegner, G., Karthe, W., Bauer, HD., Moser, H.O. (eds) Integrated Optics and Micro-Optics with Polymers. TEUBNER-TEXTE zur Physik. Vieweg+Teubner Verlag, Wiesbaden. https://doi.org/10.1007/978-3-322-93430-7_14
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DOI: https://doi.org/10.1007/978-3-322-93430-7_14
Publisher Name: Vieweg+Teubner Verlag, Wiesbaden
Print ISBN: 978-3-322-93431-4
Online ISBN: 978-3-322-93430-7
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