Abstract
UV-Initiated Polymerization (UVIP) is a method for fabrication of diffractive and refractive optical elements e.g. lenses, prisms and other phase-only structures. Flexible function and design is possible. The surface relief structures are realized by UV-initiated polymerization. This process consists of an UV-sensitized PMMA-resist (PolyMethylMeth-Acrylate), which is spin coated and exposed at a wavelength of 365nm. Afterwards the resist is developed in MMA vapour (monomer of PMMA). Due to additional polymerization the exposed regions swell. Due to the linear response of the resist accurate control of the surface profile is possible by lithographic means.
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© 1993 B. G. Teubner Verlagsgesellschaft Leipzig
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Bagordo, G., Brenner, KH., Merklein, T.M., Rohrbach, A. (1993). Fabrication of Micro-Optic Elements by UV-initiated Polymerization. In: Ehrfeld, W., Wegner, G., Karthe, W., Bauer, HD., Moser, H.O. (eds) Integrated Optics and Micro-Optics with Polymers. TEUBNER-TEXTE zur Physik. Vieweg+Teubner Verlag, Wiesbaden. https://doi.org/10.1007/978-3-322-93430-7_13
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DOI: https://doi.org/10.1007/978-3-322-93430-7_13
Publisher Name: Vieweg+Teubner Verlag, Wiesbaden
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