Deep Proton Irradiation of PMMA for a 3D Integration of Micro-Optical Components

Part of the TEUBNER-TEXTE zur Physik book series (TTZP)


An integration of microoptical components to threedimensional systems is of interest for optical information processing as well as for optical interconnections. Polymethyl methacrylate (PMMA) is a suitable substrate material, because microprisms, beamsplitters and microlenses can be integrated monolithically in the same substrate by deep proton irradiation. The microcomponents can be combined to compact microoptical imaging systems which are easy to align. The fabrication method and the imaging properties of this system are discussed and applications are outlined.


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Copyright information

© B. G. Teubner Verlagsgesellschaft Leipzig 1993

Authors and Affiliations

  1. 1.Physics InstituteUniversity of Erlangen-NurembergErlangenFederal Republic of Germany

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