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Vakuummeßgeräte und Lecksuchgeräte

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Theorie und Praxis der Vakuumtechnik

Part of the book series: Lehrbuchreihe Physik ((LBP,volume 65))

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Zusammenfassung

Man unterscheidet Vakuummeßgeräte zum Messen des Totaldrucks (Abschnitt 11.2 bis 11.5) und solche zum Messen der Partialdrücke in Gasgemischen (Abschnitt 11.6). Aus der großen Vielfalt der Arten sind in Kapitel 11 nur die praktisch wichtigsten behandelt; ergänzend wird auf die zusammenfassenden Berichte [63, 68, 69, 70, 71, 72, 73, 74, 75, 75a, 76] hingewiesen. Die Lecksuchgeräte in Abschnitt 11.7 sind massenspektrometrische Partialdruckmeßgeräte. Sie werden daher in Kap. 11 behandelt, während die Lecksuchverfahren Kapitel 12 vorbehalten sind.

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Authors and Affiliations

  1. Köln, Deutschland

    Dr. phil. Hermann Adam

  2. Marburg, Deutschland

    Prof. Dr. Ing. Dr. rer. nat. h. c. Wilhelm Walcher

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  1. Max Wutz
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  2. Dr. phil. Hermann Adam
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© 1992 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH, Braunschweig/Wiesbaden

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Wutz, M., Adam, H., Walcher, W. (1992). Vakuummeßgeräte und Lecksuchgeräte. In: Theorie und Praxis der Vakuumtechnik. Lehrbuchreihe Physik, vol 65. Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-87814-4_11

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