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Micrometallurgy by Ion Implantation

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Nuclear Physics Methods in Materials Research

Abstract

Ion implantation consists of a process in which chosen ions are accelerated in vacuum to energies of a few tens or hundreds of keV and injected into the surface layers of a material. By altering the composition, generally of a shallow layer less than a micron in thickness, the surface properties are modified.

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Authors and Affiliations

  1. AERE Harwell, England

    G. Dearnaley

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  1. G. Dearnaley
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Editor information

Klaus Bethge Horst Baumann Hartmut Jex Friedrich Rauch

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© 1980 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH, Braunschweig

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Dearnaley, G. (1980). Micrometallurgy by Ion Implantation. In: Bethge, K., Baumann, H., Jex, H., Rauch, F. (eds) Nuclear Physics Methods in Materials Research. Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-85996-9_4

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  • DOI: https://doi.org/10.1007/978-3-322-85996-9_4

  • Publisher Name: Vieweg+Teubner Verlag

  • Print ISBN: 978-3-528-08489-9

  • Online ISBN: 978-3-322-85996-9

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