Abstract
The stoichiometry of composite materials has been measured as a function of depth. Target materials were sandwich structures, Al5s, borides, hydrides, amorphous films, pieces of a TOKAMAK wall, or semiconductors. Furthermore the sputtering yield of Au by 3 keV Ar+ ions was calibrated by Rutherfordbackscattering in UHV.
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W.-K. Chu, J.W. Mayer, M.-A. Nicolet: Backscattering Spectrometry, Academic Press, New York, 1978
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C. Nölscher, Diplomarbeit, 1980, to be published
P. Müller, W. Szymczak, G. Ischenko, Nucl. Instr. Meth. 149, 239 (1978)
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© 1980 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH, Braunschweig
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Nölscher, C. et al. (1980). Elastic Backscattering and Recoil Detection Analysis Using A 6 Mv Tandem Accelerator. In: Bethge, K., Baumann, H., Jex, H., Rauch, F. (eds) Nuclear Physics Methods in Materials Research. Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-85996-9_34
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DOI: https://doi.org/10.1007/978-3-322-85996-9_34
Publisher Name: Vieweg+Teubner Verlag
Print ISBN: 978-3-528-08489-9
Online ISBN: 978-3-322-85996-9
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