Abstract
Since the advent of microelectronics there has been a continuous development towards eve smaller microstructures until in the last years one reached one limit set by the wavelength of light. Consequently there have been many, and some highly successful, attempts to overcome this barrier by using other types of radiation to make microcircuits even smaller, faster, more complex and at the same time less expensive.
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References
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© 1980 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH, Braunschweig
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Fischer, B.E., Spohr, R. (1980). Microtooling and Microscopy with Heavy Ions Some Examples of Applied Research at GSI. In: Bethge, K., Baumann, H., Jex, H., Rauch, F. (eds) Nuclear Physics Methods in Materials Research. Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-85996-9_18
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DOI: https://doi.org/10.1007/978-3-322-85996-9_18
Publisher Name: Vieweg+Teubner Verlag
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