Abstract
At high track densities, the ion tracks can be utilized for imprinting structures onto solids in the same way as conventional lithographies [1], [2], This technique has several advantages in comparison with conventional techniques (Table 10-1).
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© 1990 Friedr. Vieweg & Sohn Verlagsgesellschaft mbH, Braunschweig
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Spohr, R. (1990). Growth areas. In: Bethge, K. (eds) Ion Tracks and Microtechnology. Vieweg+Teubner Verlag, Wiesbaden. https://doi.org/10.1007/978-3-322-83103-3_11
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DOI: https://doi.org/10.1007/978-3-322-83103-3_11
Publisher Name: Vieweg+Teubner Verlag, Wiesbaden
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