Abstract
Miniaturization has led to an increase in the use of micromachining processes. The need for the material processing at microatomic resolution at an economical cost has underpinned this technology in many industries. Laser micromachining is a precise noncontact type of machining process which is used in the fabrication of micro-components ranging up to 500 µm. Laser ablation distinctively focuses on the small elemental areas which helps to absorb a high percentage of energy. This chapter represents an overview of various researches carried out in laser machining fields, its applicability and the advancements made. It also shows the implementation of ultrashort and femtosecond pulsed laser micromachining. Laser micromachining has lot of advantages over conventional contact machining processes as for instance the machining of any workpiece material can be easily accomplished within predefined time. Femtosecond laser machining can machine even transparent materials like glass, sapphire. The analysis of various theoretical and experimental research is used to describe the performance of laser beam micromachining (LBMM) on some of the advanced engineering materials.
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References
B.E.A. Saleh, M.C. Teich, Fundamentals of Photonics, 2nd edn (Wiley, 2007). https://doi.org/10.1002/9783527635245.ch2
S.C. Singh, H. Zeng, C. Guo, W. Cai, Lasers: fundamentals, types, and operations, in Nanomaterials: Processing and Characterization with Lasers (2012), pp. 1–34. https://doi.org/10.1002/9783527646821.ch1
A.P. Kumar, Laser micromachining: technology and applications. Int. J. Eng. Res. Appl. (IJERA), ISSN: 2248-9622 National Conference on Advances in Engineering and Technology. (AET-29th March 2014)
Q. Bian, S. Chen, B.T. Kim, N. Leventis, H. Lu, Z. Chang, S. Lei, Micromachining of polyurea aerogel using femtosecond laser pulses. J. Non-Crystal. Solids 357(1), 186–193 (2011). https://doi.org/10.1016/j.jnoncrysol.2010.09.037
U. Klotzbach, A.F. Lasagni, M. Panzner, V. Franke, Laser Micromachining, in Fabrication and Characterizationin the Micro-Nano Range, Advanced Structured Materials, ed. by F.A. Lasagni, A.F. Lasagni, vol. 10 (2011). https://doi.org/10.1007/978-3-642-17782-8_2
U. Klotzbach, A.F. Lasagni, M. Panzner, V. Franke, Laser Micromach. Spr. 10, 29–119 (2011). https://doi.org/10.1007/978-3-642-17782-8
H. KnowlesR, Karnakis G. RutterfordM, A.D. Ferguson, Micromachining of metals, ceramics and polymers using nanosecond lasers. Int. J. Adv. Manuf. Technol. 33, 95–102 (2007). https://doi.org/10.1007/s00170-007-0967-2
T. Brettschneider, C. Dorrer, D. Czurratis, R. Zengerle, M. Daub, Laser micromachining as a metallization tool for micro fluidic polymer stacks. J. Micromech. Micro Eng. 23(3) (2013). https://doi.org/10.1088/0960-1317/23/3/035020
R.P. Patel, D.M. Patel, Grey relational analysis based optimization of laser cutting process parameters for aluminum alloy—a review. Int. J. Eng. Res. Technol. (IJERT) 3(3) (2014). ISSN: 2278-0181
M.R.M. Rejab, T.T. Mon, M.F.F. Rashid, N.S.M. Shalahim, M.F. Ismail, Virtual laser-micromachining of MEMS components. Int. J. Recent Trend. Eng. 1(5) (2009)
A. Parashar, J.S. Mann, A. Shah, N.R. Sivakumar, Numerical and experimental study of interference based micromachining of stainless steel. JLMN-J. Laser Micro/ Nano-eng. 4(2) (2009)
M. Manjaiah, S. Narendranath, S. Basavarajappa, Review on non-conventional machining of shape memory alloys. Trans. Nonferrous Metals Soc. China (English Edition) 24(1), 12–21 (2014). https://doi.org/10.1016/S1003-6326(14)63022-3
Y. Long, Q. Liu, Z. Zhong, L. Xiong, T. Shi, Experimental study on the processes of laser-enhanced electrochemical micromachining stainless steel. Optik 126(19), 1826–1829 (2015). https://doi.org/10.1016/j.ijleo.2015.05.019
S.N. Akhtar, S.A. Ramakrishna, J. Ramkumarv, Excimer laser micromachining for miniaturized hybrid microwave integrated circuits. Directions 15(1) (2015)
A. Sen, B. Doloi, B. Bhattacharyya, Experimental studies on fibre laser micro-machining of Ti-6al-4v, in 5th International & 26th All India Manufacturing Technology, Design and Research conference (AIMTDR 2014), 14 Dec 2014
N.S.M. Shalahim, T.T. Mon, M.F. Ismail, M.F.F. Rashid, M.R.M. Rejab, Finite Element Simulation of Laser-Micromachining”. Proceedings of the International Multi Conference of Engineers and Computer Scientists, IMECS 2010, vol. 3 (Hong Kong, 17–19 March 2010)
C.K. Walker, G. Narayanan, H. Knoepfle, J. Capara, J. Glenn, A. Hungerford, T.M. Bloomstein, S.T. Palmacci, M.B. Stern, J.E. Curtin, Laser micromachining of silicon: a new technique for fabricating high quality terahertz waveguide components, in Proceedings of 8th international symposium on space terahertz technology (Harvard University, 1997), p. 358
L. Slatineanu, M. Coteaţă, O. Dodun, A. Iosub, L. Apetrei, Impact phenomena in the case of some non-traditional machining processes, in Project No. ID 625 National Council of Scientific Research in Higher Education (Romania) (2008)
S. Mishra, V. Yadava, Laser beam micromachining (LBMM)—a review. Opt. Lasers Eng. (2015). https://doi.org/10.1016/j.optlaseng.2015.03.017
M.C. Gower, Industrial applications of laser micromachining. Opt. Exp. 7(2), 56–67 (2000). https://doi.org/10.1364/OE.7.000056
N. Bloembergen, Laser-material interactions; fundamentals and applications, in AIP Conference Proceedings, vol. 288. (1993), pp. 3–10. https://doi.org/10.1063/1.44887
J.C. Miller, History, scope and the future of laser ablation, in Laser Ablation, Principles and Applications, ed. by J.C. Miller. Springer (1994)
Y. Kawamura, K. Toyoda, S. Namba, Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser. Appl. Phys. Lett. 40(5), 374–375 (1982). https://doi.org/10.1063/1.93108
R. Srinivasan, V. Mayne-Banton, Self-developing photoetching of poly (ethylene terephthalate) films by far-ultraviolet excimer laser radiation. Appl. Phys. Lett. 41(6), 576–578 (1982). https://doi.org/10.1063/1.93601
B. Wilhelmi, J. Herrmann, Lasers for Ultrashort Light Pulses, OSTI-Identifier:5733239 (United States, 1987)
M.S. Brown, C.B. Arnold, Fundamentals of laser-material interaction and application to multiscale surface modificatication. Springer Ser. Mat. Sci. 135(0933–033X), 91–120 (2010). https://doi.org/10.1007/978-3-642-10523-4.
J.R. Lankard, G.E. Wolbold, Laser ablation of polyimide in a manufacturing facility. Appl. Phys. A54, 355 (1992)
F.O. Olsen, L. Alting, Pulsed laser materials processing, ND-YAG versus CO2 Lasers. CIRP Ann. Manuf. Technol. 44(1), 141–145 (1995). https://doi.org/10.1016/S0007-8506(07)62293-8
J. Meijer, Laser beam machining (LBM), state of the art and new opportunities. J. Mat. Process. Technol. 149, 2–17 (2004). https://doi.org/10.1016/j.jmatprotec.2004.02.003
X. Liu, D. Du, G. Mourou, Laser ablation and micromachining with ultrashort laser pulses. IEEE J. Quant. Electronics, 33(10), 1706–1716 (1997). https://doi.org/10.1109/3.631270
E. Ohmura, I. Fukumoto, Study on fusing and evaporating process of fcc metal due to laser irradiation using molecular dynamics. Int. J. Jpn. Soc. Precis. Eng. 30, 47–48 (1996)
F.J. McClung, R.W. Hellwarth, Giant optical pulsations from ruby. J. Appl. Phys. 33(3), 828–829 (1962). https://doi.org/10.1063/1.1777174
R.S. Patel, T.F. Redmond, C. Tessler, D. Tudryn, D. Pulaski, Production benefits from excimer laser tools, in Laser Focus World (1996)
C. Rowan, Excimer lasers drill precise holes with higher yields, in Laser Focus World (1995)
M.C. Gower, Excimer lasers for surgery and biomedical fabrication, in Nanotechnology in Medicine and the Biosciences, ed. by R.R.H. Coombs, D.W. Robinson (Gordon & Breach, New York, 1996)
B. Tan, K. Venkatakrishnan, Thermal coupling in multishot laser microvia drilling for interconnection application. J. Vac. Sci. Technol. B Microelectron. Nanometer Struct. 24, 211–215 (2006). https://doi.org/10.1116/1.2162573
J.N. Reddy, An Introduction to the Finite Element Method (McGraw-Hill, New York, USA, 2006). ISBN 9780072466850
C.B. Arnold, A. Piqué, Laser Direct-Write Processing. MRS Bulletin 32, 15 (2007)
K. Venkatakrishnan, B. Tan, N.R. Sivakumar, Submicron machining of metallic film by low influence ultrashort”. Opt. Laser Technol. 34, 575–578 (2002)
S.D. Allen, M. Bass, M.L. Teisniger, Comparison of pulsed Nd:YAG and pulsed CO2 lasers for hole drilling in printed circuit board materials, in CLEO Conference Summary (1982)
F. Bachman, Excimer lasers in a fabrication line for a highly integrated printed circuit board. Chemtronics 4, 149 (1989)
P. Crosby, Get to know types of lasers, in Materials Processing Units from Coherent Inc. June 2002.
J.P. Desbiens, P. Masson, ArF excimer laser micromachining of Pyrex, SiC and PZT for rapid prototyping of MEMS components. Sens. Actuators A Phys. 136(2), 554–563 (2007). https://doi.org/10.1016/j.sna.2007.01.002
W.S. Lau, W.B. Lee, S.Q. Pang, Pulsed Nd: YAG laser cutting of carbon fibre composite materials. CIRP Ann. Manuf. Technol. 39(1), 179–182 (1990). https://doi.org/10.1016/S0007-8506(07)61030-0
J. Meijer, K. Du, A. Gillner, D. Hoffmann, V.S. Kovalenko, T. Masuzawa, W. Schulz, Laser machining by short and ultrashort pulses, state of the art and new opportunities in the age of the photons. CIRP Ann. Manuf. Technol. 51(2), 531–550 (2002). https://doi.org/10.1016/S0007-8506(07)61699-0
H.W. Mocker, R.J. Collins, Mode competition and self-locking effects in a q-switched ruby laser. Appl. Phys. Lett. 7(10), 270–273 (1965). https://doi.org/10.1063/1.1754253
E. Ohmura, I. Fukumoto, I. Miyamoto, Molecular dynamics simulationon laser ablation and thermal shock phenomena, in Proceedings of the ICALEO (1998), pp. A45–A54
R. Paschotta, R.P. Photonics, C. Gmbh, Solid state lasers for ultrashort pulses—a diverse family, in Photonick International (2006), pp. 1–4
S. Ronald, Fundamentals of Laser Micromachining (CRC Press, A Taylor & Francis Group, USA, 2012). ISBN 9781439860557
M.N. Watson, Laser drilling of printed circuit boards, in Circuit World, (1984), pp. 11, 13
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Faisal, N., Zindani, D., Kumar, K., Bhowmik, S. (2019). Laser Micromachining of Engineering Materials—A Review. In: Kumar, K., Zindani, D., Kumari, N., Davim, J. (eds) Micro and Nano Machining of Engineering Materials. Materials Forming, Machining and Tribology. Springer, Cham. https://doi.org/10.1007/978-3-319-99900-5_6
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