Abstract
In this contribution, the potential of film and foil-based shape memory alloy (SMA) microactuators for fluid handling applications is explored. SMAs provide a high work density and allow for compact and robust actuator designs based on the one-way shape memory effect. Compared to more commonly used wires, actuators fabricated from thin film or foil material allow for more complex designs having several degrees of freedom and enable shorter switching times in the range of 10 ms. In order to commercialize such actuators, the “memetis GmbH” was founded as a high-tech spin-off of the Karlsruhe Institute of Technology (KIT) in Germany. Memetis is focused on miniature fluid handling products and combines rapid prototyping and rapid manufacturing techniques such as 3D printing, laser cutting and CNC milling of polymer housings for customer-specific device development. A normally open microvalve is presented here as an example, which is actuated by a novel fatigue-free TiNiCu film actuator.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Kohl, M (2013) Shape memory microactuators. Springer Science & Business Media
http://www.actuatorsolutions.de/products/miniature-camera/. Accessed 9 Aug 2017
http://www.takasago-fluidics.com/p/valve/s/smad_valve/SMV/49/. Accessed 9 Aug 2017
Chen X, Srivastava V, Dabade V, James RD (2013) Study of the cofactor conditions: Conditions of supercompatibility between phases. J Mech Phys Sol 61(12):2566–2587. https://doi.org/10.1016/j.jmps.2013.08.004
Chluba C, Ge W, Lima de Miranda R, Strobel J, Kienle L, Quandt E, Wuttig M (2015) Ultralow-fatigue shape memory alloy films. Science 348(6238):1004–1007. https://doi.org/10.1126/science.1261164
Kohl M, Krevet B, Just E (2002) SMA microgripper System. Sens Actuators A 97–98:646–652
Megnin C, Kohl M (2014) Shape memory alloy microvalves for a fluidic control system. J Micromech Microeng 24:025001. https://doi.org/10.1088/0960-1317/24/2/025001
Lima de Miranda R, Zamponi C, Quandt E (2012) Micropatterned freestanding superelastic TiNi films. Adv Eng Mat 15(1–2):66–69. https://doi.org/10.1002/adem.201200197
Barth J, Megnin C, Kohl M (2012) A Bistable Shape Memory Alloy Microvalve With Magnetostatic Latches. J Mircomechanical Systems 21(1):76–84. https://doi.org/10.1109/JMEMS.2011.2174428
Acknowledgements
The authors acknowledge funding by Exist Forschungstransfer, a program of ESF and BmWi.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2018 The Minerals, Metals & Materials Society
About this paper
Cite this paper
Ossmer, H., Gueltig, M., Wessendorf, C., Kohl, M., Megnin, C. (2018). Film and Foil-Based Shape Memory Alloy Microactuators for Fluid Handling. In: Stebner, A., Olson, G. (eds) Proceedings of the International Conference on Martensitic Transformations: Chicago. The Minerals, Metals & Materials Series. Springer, Cham. https://doi.org/10.1007/978-3-319-76968-4_31
Download citation
DOI: https://doi.org/10.1007/978-3-319-76968-4_31
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-76967-7
Online ISBN: 978-3-319-76968-4
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)