Initial Epitaxial Growth Processes of III-Nitride Compounds

Chapter
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 269)

Abstract

The epitaxial growth of thin films is controlled by various growth processes that involve adsorption of atoms and molecules onto a reconstructed surface, their subsequent diffusion across the surface, dissociation of molecules, and desorption from the surface.

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Copyright information

© Springer International Publishing AG, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Department of Physics EngineeringMie UniversityTsuJapan

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