Abstract
Substrate is the foundation of semiconductor packaging. In this chapter, we will learn about various substrate technologies, structures, and manufacturing design rules. We will also learn about substrate stack-up set-up routing consideration. We will discuss silicon interposer manufacturing process and its application including interposer size, TSV aspect ratios.
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Yazdani, F. (2018). Substrate Physical Implementation. In: Foundations of Heterogeneous Integration: An Industry-Based, 2.5D/3D Pathfinding and Co-Design Approach. Springer, Cham. https://doi.org/10.1007/978-3-319-75769-8_4
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DOI: https://doi.org/10.1007/978-3-319-75769-8_4
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Publisher Name: Springer, Cham
Print ISBN: 978-3-319-75767-4
Online ISBN: 978-3-319-75769-8
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