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Kelvin Probe Force Microscopy pp 227–247Cite as

Quantitative Analysis of Kelvin Probe Force Microscopy on Semiconductors

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Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 65))

Abstract

As is well known, Kelvin Probe Force Microscopy (KPFM) is a powerful and versatile tool to measure the contact potential difference (CPD) in metals. Here, we discuss the application of KPFM for the investigation of semiconducting materials, where the interpretation of KPFM is complicated by band bending and surface charge. Nevertheless, it is demonstrated that the signal measured with KPFM in semiconductors should be interpreted as the contact potential difference (CPD). This interpretation enables the extraction of information related to semiconductor properties such as the dopant density, surface charge, density of surface states, and band bending. The CPD description and its validation are discussed in detail. Also, model calculations of the expected KPFM signal are presented for a wide range of doping concentrations and for various types of surface charge models, including surface states with a Fermi level dependent charge and surface states with fixed charge. It is demonstrated that the model calculations within the CPD model are consistent with experiments from the literature. As an example of how KPFM data on semiconductors can be analyzed, it is shown how information on surface charge is obtained from measurements on Si pn-junction dopant profiles. Combining KPFM with illumination provides many interesting possibilities for the study of semiconductors, which are briefly discussed at the end of this chapter.

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Acknowledgements

This chapter is largely based on a previous publication by the same authors [12], and we thank the American Physical Society for the right given to authors to reuse their figures in another publication. This work is part of the research program of the Foundation for Fundamental Research on Matter (FOM), which is part of the Netherlands Organization for Scientific Research (NWO) and was carried out within the research program of BioSolar Cells, co-financed by the Dutch Ministry of Economic Affairs.

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Authors and Affiliations

  1. Department of Physics and Astronomy, Vrije Universiteit Amsterdam, Amsterdam, The Netherlands

    Leo Polak & Rinke J. Wijngaarden

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  1. Leo Polak
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  2. Rinke J. Wijngaarden
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Correspondence to Rinke J. Wijngaarden .

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Editors and Affiliations

  1. International Iberian Nanotechnology Laboratory, Braga, Portugal

    Sascha Sadewasser

  2. Department of Physics, University of Basel, Basel, Switzerland

    Thilo Glatzel

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Polak, L., Wijngaarden, R.J. (2018). Quantitative Analysis of Kelvin Probe Force Microscopy on Semiconductors. In: Sadewasser, S., Glatzel, T. (eds) Kelvin Probe Force Microscopy. Springer Series in Surface Sciences, vol 65. Springer, Cham. https://doi.org/10.1007/978-3-319-75687-5_9

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