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Optical Characterization of Thin Solid Films pp 315–339Cite as

Scanning Probe Microscopy Characterization of Optical Thin Films

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Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 64))

Abstract

Scanning Probe Microscopy is a technique very frequently used for thin film surfaces measurements at different stages of their preparation and/or characterization. It provides information about the surface morphology and can also be used to measure locally various physical quantities. In this chapter we discuss typical quantities measured and evaluated in the field of thin films, which basically consists of roughness characterization and film thickness determination. The basics of instrumentation, related metrology and techniques to perform measurements on large area to obtain enough statistical information about the sample properties are discussed as well.

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Author information

Authors and Affiliations

  1. Czech Metrology Institute, Okružní 31, 63800, Brno, Czech Republic

    Petr Klapetek

Authors
  1. Petr Klapetek
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Correspondence to Petr Klapetek .

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Editors and Affiliations

  1. Abbe School of Photonics, Friedrich-Schiller-University Jena, Jena, Thüringen, Germany

    Olaf Stenzel

  2. Institute of Physical Engineering, Brno University of Technology, Brno, Czech Republic

    Miloslav Ohlídal

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Klapetek, P. (2018). Scanning Probe Microscopy Characterization of Optical Thin Films. In: Stenzel, O., Ohlídal, M. (eds) Optical Characterization of Thin Solid Films. Springer Series in Surface Sciences, vol 64. Springer, Cham. https://doi.org/10.1007/978-3-319-75325-6_11

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