Abstract
Scanning Probe Microscopy is a technique very frequently used for thin film surfaces measurements at different stages of their preparation and/or characterization. It provides information about the surface morphology and can also be used to measure locally various physical quantities. In this chapter we discuss typical quantities measured and evaluated in the field of thin films, which basically consists of roughness characterization and film thickness determination. The basics of instrumentation, related metrology and techniques to perform measurements on large area to obtain enough statistical information about the sample properties are discussed as well.
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Klapetek, P. (2018). Scanning Probe Microscopy Characterization of Optical Thin Films. In: Stenzel, O., Ohlídal, M. (eds) Optical Characterization of Thin Solid Films. Springer Series in Surface Sciences, vol 64. Springer, Cham. https://doi.org/10.1007/978-3-319-75325-6_11
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DOI: https://doi.org/10.1007/978-3-319-75325-6_11
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