Abstract
Optical thin film characterization represents the total of all theoretical and experimental activities, which pursue determination of various thin film construction parameters. The purpose of optical characterization is usually in the determination of film thickness, refractive index and extinction coefficient, porosity, surface roughness, film stoichiometry, film density and the like.
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Stenzel, O., Ohlídal, M. (2018). Introduction. In: Stenzel, O., Ohlídal, M. (eds) Optical Characterization of Thin Solid Films. Springer Series in Surface Sciences, vol 64. Springer, Cham. https://doi.org/10.1007/978-3-319-75325-6_1
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DOI: https://doi.org/10.1007/978-3-319-75325-6_1
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