Abstract
In the last two decades, products have been revolutionised by making them smaller, lighter and even more compact. Some of the requirements for making products smaller and lighter were borne out of the necessity to reduce global warming through the reduction of fuel consumption in moving parts (transportation industries). Also, the bulkiness of products in the past was partly as a result of manufacturing limitations, that is, unavailability of suitable manufacturing process to fabricate the smaller product. Miniaturisation has gained popularity in every areas of human endeavour, ranging from laboratory instruments which were once gigantic and can now fit into one’s palm (becoming handheld). The push towards miniaturisation is constantly being pursued in the research community through the development of manufacturing technology that promotes miniaturisation pursuit as well as constant development of these technologies. Advanced cutting technologies take a significant role in achieving miniaturised components since manufacturing these micro- and nano-components relied heavily on effective cutting processes. In this chapter, micro- and nano-machining using various advanced cutting processes that were presented in Chaps. 2–5 in this book is presented. A number of research works have appeared in the literature on these interesting areas of research and some of them are presented in this chapter.
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References
Y. Liu, D. Zhu, Y. Zeng, H. Yu, Development of microelectrodes for electrochemical micromachining. Int. J. Adv. Manuf. Technol. 55, 195–203 (2011)
R. Thanigaivelan, R.M. Arunachalam, P. Drukpa, Drilling of micro-holes on copper using electrochemical micromachining. Int. J. Adv. Manuf. Technol. 61, 1185–1190 (2012)
E.-S. Lee, J.-W. Park, Y.-H. Moon, A study on electrochemical micromachining for fabrication of microgrooves in an air-lubricated hydrodynamic bearing. Int. J. Adv. Manuf. Technol. 20, 720–726 (2002)
X. Zhang, N. Qu, X. Fang, Sandwich-like electrochemical micromachining of micro-dimples using a porous metal cathode. Surf. Coat. Technol. 311, 357–364 (2017)
V.M. Volgin, V.V. Lyubimov, I.V. Gnidina, A.D. Davydov, T.B. Kabanov, Effect of current efficiency on electrochemical micromachining by moving electrode. Procedia CIRP 55, 65–70 (2016)
Y. Ye, H. Lianhuan, H. Di, S. Jian-Jia, T. Zhong-Qun, T. Zhao-Wu, Z. Dongping, Electrochemical micromachining under mechanical motion mode. Electrochim. Acta 183, 3–7 (2015)
W. Liu, S. Ao, Y. Li, Z. Liu, Z. Luo, Z. Wang, R. Song, Modeling and fabrication of microhole by electrochemical micromachining using retracted tip tool. Precis. Eng. 50, 77–84 (2017)
K.M. Cole, D.W. Kirk, C.V. Singh, S.J. Thorpe, Optimizing electrochemical micromachining parameters for Zr-basedbulk metallic glass. J. Manuf. Process. 25, 227–234 (2017)
S.S. Anasane, B. Bhattacharyya, Experimental investigation into micromilling of microgrooves ontitanium by electrochemical micromachining. J. Manuf. Process. 28 (, 285–294 (2017)
K. Wang, Q. Zhang, G. Zhu, Q. Liu, Y. Huang, Experimental study on micro electrical discharge machining with helical electrode. Int. J. Adv. Manuf. Technol. 93, 2639–2645 (2017)
K. Wang, Q. Zhang, Q. Liu, G. Zhu, J. Zhang, Experimental study on micro electrical discharge machining of porous stainless steel. Int. J. Adv. Manuf. Technol. 90, 2589–2595 (2017)
H.K. Yoo, W.T. Kwon, S. Kang, Development of a new electrode for micro-electrical discharge machining (EDM) using Ti(C,N)-based cermet. Int. J. Precis. Eng. Manuf. 15(4), 609–616 (2014)
G.S. Prihandana, M. Mahardika, M. Hamdi, Y.S. Wong, K. Mitsui, Accuracy improvement in nanographite powder-suspended dielectric fluid for micro-electrical discharge machining processes. Int. J. Adv. Manuf. Technol. 56, 143–149 (2011)
S. Skoczypiec, A. Ruszaj, A sequential electrochemical–electrodischarge process for micropart manufacturing. Precis. Eng. 38, 680–690 (2014)
L. Raju, S.S. Hiremath, A state-of-the-art review on micro electro-discharge machining. Procedia Technol. 25, 1281–1288 (2016)
K.P. Rajurkar, M.M. Sundaram, A.P. Malshe, Review of electrochemical and electrodischarge machining. Procedia CIRP 6, 13–26 (2013)
J. Forneris, A. Battiato, D. Gatto Monticone, F. Picollo, G. Amato, L. Boarino, G. Brida, I.P. Degiovanni, E. Enrico, M. Genovese, E. Moreva, P. Traina, C. Verona, G. Verona Rinati, P. Olivero, Electroluminescence from a diamond device with ion-beam-micromachined buried graphitic electrodes. Nucl. Inst. Methods Phys. Res. B 348, 187–190 (2015)
L.-C. Chao, C.-C. Ye, Y.-P. Chen, H.-Z. Yu, Facile fabrication of ZnO nanowire-based UV sensors by focused ion beam micromachining and thermal oxidation. Appl. Surf. Sci. 282, 384–389 (2013)
F. Nesprias, M. Venturino, M.E. Debray, J. Davidson, M. Davidson, A.J. Kreiner, D. Minsky, M. Fischer, A. Lamagn, Heavy ion beam micromachining on LiNbO3. Nucl. Inst. Methods Phys. Res. B 267, 69–73 (2009)
F. Yongqi, N.K.A. Bryan, O.N. Shing, H.N.P. Wyan, Influence analysis of dwell time on focused ion beam micromachining in silicon. Sens. Actuators 79, 230–234 (2000)
H. Yang, S. Rachev, Focused Ion Beam Micro Machining and Micro Assembly. IPAS, ed. by S. Ratchev, IFIP AICT 315, 2010, pp. 81–86
S.S. Singh, P.K. Baruah, A. Khare, S.N. Joshi, Effect of laser beam conditioning on fabrication of clean micro-channel on stainless steel 316L using second harmonic of Q-switched Nd:YAG laser. Opt. Laser Technol. 99, 107–117 (2018)
J. Lehr, A.-M. Kietzig, Production of homogenous micro-structures by femtosecond laser micro-machining. Opt. Laser Eng. 57, 121–129 (2014)
S.W. Lee, H.S. Shin, C.N. Chu, Fabrication of micro-pin array with high aspect ratio on stainless steel using nanosecond laser beam machining. Appl. Surf. Sci. 264, 653–663 (2013)
K.T. Paula, G. Gaál, G.F.B. Almeida, M.B. Andrade, M.H.M. Facure, D.S. Correa, A. Riul Jr., V. Rodrigues, C.R. Mendonça, Femtosecond laser micromachining of polylactic acid/graphene composites for designing interdigitated microelectrodes for sensor applications. Opt. Laser Technol. 101, 74–79 (2018)
G. Petzold, P. Siebert, J. Mu¨ller. A micromachined electron beam ion source. Sens. Actuators B 67, 101–111 (2000)
L. Wang, J. Tang, Q.-A. Huang, Gamma and electron beam irradiation effects on the resistance of micromachined polycrystalline silicon beams. Sens. Actuators A 177, 99–104 (2012)
R. Malhotra, I. Saxena, K. Ehmann, J. Cao, Laser-induced plasma micro-machining (LIPMM) for enhanced productivity and flexibility in laser-based micro-machining processes. CIRP Ann. Manuf. Technol. 62, 211–214 (2013)
I. Saxena, S. Wolff, J. Cao, Unidirectional magnetic field assisted laser induced plasma micro-machining. Manuf. Lett. 3, 1–4 (2015)
G. Shang, H. Han, Recent advances in micro- and nano-machining technologies. Front. Mech. Eng. 12(1), 18–32 (2017)
W. Wu, W. Li, F. Fang, Z.W. Xu, Micro tools fabrication by focused ion beam technology, in Handbook of Manufacturing Engineering and Technology, ed. by A. Y. C. Nee (Ed), (Springer-Verlag, London, 2015), pp. 1473–1511
M. Ganesh, A. Sidpara, S. Deb, Fabrication of micro-cutting tools for mechanical micro-machining, in Advanced Manufacturing Technologies, Materials Forming, Machining and Tribology, ed. by K. Gupta (Ed), (Springer International Publishing AG, Cham, 2017), pp. 3–20
K. Das, J.B. Freund, H.T. Johnson, Erosive-thermal transition in high-flux focused ion beam nanomachining of surfaces. Ext. Mech. Lett. 7, 121–125 (2016)
S. Mishra, V. Yadava, Laser beam micromachining (LBMM)—a review. Opt. Laser Eng. 73, 89–122 (2015)
T. Otani, L. Herbst, M. Heglin, S.V. Govorkov, A.O. Wiessner, Microdrilling and micromachining with diode-pumped solid-state lasers. Appl. Phys. A Mater. Sci. Process. 79, 1335–1339 (2004)
M.S. Cheema, A. Dvivedi, A.K. Sharma, Tool wear studies in fabrication of microchannels in ultrasonic micromachining. Ultrasonics 57, 57–64 (2015)
M.S. Cheema, P.K. Singh, O. Tyagi, A. Dvivedi, A.K. Sharma, Tool wear and form accuracy in ultrasonically machined microchannels. Measurement 81, 85–94 (2016)
W. Pei, Z. Yu, J. Li, C. Ma, W. Xu, X. Wang, W. Natsu, Influence of abrasive particle movement in micro USM. Procedia CIRP 6, 551–555 (2013)
Z. Yu, X. Hu, K.P. Rajurkar, Influence of debris accumulation on material removal and surface roughness in micro ultrasonic machining of silicon. Ann. CIRP 55(1), 201–204 (2006)
K. Egashira, T. Masuzawa, Microultrasonic machining by the application of workpiece vibration. CIRP Ann. Manuf. Technol. 48(1), 131–134 (1999)
H. Onikura, O. Ohnishi, Y. Take, Fabrication of micro carbide tools by ultrasonic vibration grinding. Ann. CIRP 49(1), 257–260 (2000)
H. Li, J. Wang, N. Kwok, T. Nguyen, G.H. Yeoh, A study of the micro-hole geometry evolution on glass by abrasive air-jet micromachining. J. Manuf. Proc. 31, 156–161 (2018)
H. Getu, J.K. Spelt, M. Papini, Thermal analysis of cryogenically assisted abrasive jet micromachining of PDMS. Int. J. Mach. Tool. Manuf. 51(9), 721–730 (2011)
M.R. Sookhak Lari, A. Ghazavi, M. Papini, A rotating mask system for sculpting of three-dimensional features using abrasive jet micro-machining. J. Mat. Process. Technol. 243, 62–74 (2017)
R.H.M. Jafar, V. Hadavi, J.K. Spelt, M. Papini, Dust reduction in abrasive jet micro-machining using liquid films. Powder Technol. 301, 1270–1274 (2016)
A. Nouhi, M.R. Sookhak Lari, J.K. Spelt, M. Papini, Implementation of a shadow mask for direct writing in abrasive jetmicro-machining. J. Mater. Process. Technol. 223, 232–239 (2015)
D.S. Miller, Micromachining with abrasive waterjets. J. Mater. Process. Technol. 149(1–3), 37–42 (2004)
H.-T. Liu, Waterjet technology for machining fine features pertaining to micromachining. J. Manuf. Process. 12, 8–18 (2010)
J. Schwartzentruber, M. Papini, Abrasive waterjet micro-piercing of borosilicate glass. J. Mater. Process. Technol. 219, 143–154 (2015)
A. Ghobeity, M. Papini, J.K. Spelt, Computer simulation of particle interference in abrasive jet micromachining. Wear 263(1–6), 265–269 (2007)
A. Ghobeity, D. Ciampini, M. Papini, An analytical model of the effect of particle size distribution on the surface profile evolution in abrasive jet micromachining. J. Mater. Process. Technol. 209(20), 6067–6077 (2009)
H. Getu, A. Ghobeity, J.K. Spelt, M. Papini, Abrasive jet micromachining of polymethylmethacrylate. Wear 263(7–12), 1008–1015 (2007)
A. Ghobeity, T. Krajac, T. Burzynski, M. Papini, J.K. Spelt, Surface evolution models in abrasive jet micromachining. Wear 264(3–4), 185–198 (2008)
V. Tangwarodomnukun, J. Wang, C.Z. Huang, H.T. Zhu, Heating and material removal process in hybrid laser-waterjet ablation of silicon substrates. Int. J. Mach. Tool Manuf. 79, 1–16 (2014)
W. Charee, V. Tangwarodomnukun, C. Dumkum, Ultrasonic-assisted underwater laser micromachining of silicon. J. Mater. Process. Technol. 231, 209–220 (2016)
P. Pawar, R. Ballav, A. Kumar, Micromachining of borosilicate glass: a state of art review. Mater. Today Proceed. 4(2, Part A), 2813–2821 (2017)
A. Schorderet, E. Deghilage, K. Agbeviade, Tool type and hole diameter influence in deep ultrasonic drilling of micro-holes in glass. Procedia CIRP 6, 565–570 (2013)
G. Zhang, J. Guo, W. Ming, Y. Huang, X. Shao, Z. Zhang, Study of the machining process of nano-electrical discharge machining based on combined atomistic-continuum modeling method. Appl. Surf. Sci. 290, 359–367 (2014)
M. Kunieda, A. Hayasaka, X.D. Yang, S. Sano, I. Araie, Study on nano EDM using capacity coupled pulse generator. CIRP Ann. Manuf. Technol. 56, 213–216 (2007)
K. Egashira, Y. Morita, Y. Hattori, Electrical discharge machining of submicron holes using ultrasmall-diameter electrodes. Precis. Eng. 34, 139–144 (2010)
A.P. Malshe, K. Virwani, K.P. Rajurkar, D. Deshpande, Investigation of nanoscale electro machining (nano-EM) in dielectric oil. CIRP Ann. Manuf. Technol. 54, 175–178 (2005)
J.-C. Huang, C.-M. Chen, The study on the atomic force microscopy base nanoscale electrical discharge machining. Scanning 34, 191–199 (2012)
K.R. Virwani, A.P. Malshe, K.P. Rajurkar, Understanding sub-20 nm breakdown behavior of liquid dielectrics. Phys. Rev. Lett. 99, 017601 (2007)
K.R. Virwani, A.P. Malshe, K.P. Rajurkar, Understanding dielectric breakdown and related tool wear characteristics in nanoscale electro-machining process. CIRP Ann. Manuf. Technol. 56, 217–220 (2007)
V.K. Jain, Magnetic field assisted abrasive based micro-/nano-finishing. J. Mater. Process. Technol. 209(20), 6022–6038 (2009)
L. Xu, C. Zhao, Nanometer-scale accuracy electrochemical micromachining with adjustable inductance. Electrochim. Acta 248, 75–78 (2017)
Y. Wen, F. Wang, H. Yu, P. Li, L. Liu, W.J. Li, Laser-nanomachining by microsphere induced photonic nanojet. Sens. Actuators A Phys. 258, 115–122 (2017)
Jia Deng, Li Zhang, Jingyan Dong, Paul H. Cohen, AFM-based 3D nanofabrication using ultrasonic vibration assisted nanomachining, In J. Manuf. Process. , 24, (Part 1), 2016, 195-202
J. Deng, J. Dong, P. Cohen, High rate 3D nanofabrication by AFM-based ultrasonic vibration assisted nanomachining. Procedia Manuf. 5, 1283–1294 (2016)
J. Deng, L. Zhang, J. Dong, P.H. Cohen, AFM-based 3D nanofabrication using ultrasonic vibration assisted nanomachining. Procedia Manuf. 1, 584–592 (2015)
J. Shi, L. Liu, P. Yu, Y. Cong, G. Li, Phase shifting-based debris effect detection in USV-assisted AFM nanomachining. Appl. Surf. Sci. 413, 317–326 (2017)
A. Rodríguez, M.C. Morant-Miñana, A. Dias-Ponte, M. Martínez-Calderón, M. Gómez-Aranzadi, S.M. Olaizola, Femtosecond laser-induced periodic surface nanostructuring of sputtered platinum thin films. Appl. Surf. Sci. 351, 135–139 (2015)
J. Wood, Nanomachining with fast laser pulses: fabrication and processing. Mater. Today 7(7–8), 21 (2004)
Acknowledgments
This work was supported by the University of Johannesburg research council (URC) fund and University of Ilorin.
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Mahamood, R.M., Akinlabi, E.T. (2018). Application of Advanced Cutting Technologies to Micro- and Nano-Manufacturing. In: Advanced Noncontact Cutting and Joining Technologies. Mechanical Engineering Series. Springer, Cham. https://doi.org/10.1007/978-3-319-75118-4_6
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DOI: https://doi.org/10.1007/978-3-319-75118-4_6
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