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Design, Analysis, and Development of a Piezoelectric Microsyringe Pump

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Micromachines for Biological Micromanipulation
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Abstract

This chapter presents the design, analysis, and testing of a microsyringe pump for delivering the liquid inside a tiny tube precisely. To facilitate precision actuation of the microsyringe, a uniaxial micromotion pump is devised with flexure-based compliant mechanisms. Based on the specifications on travel range and load capability, a compliant stage with translational motion is developed. Parameter optimization of the stage mechanism is conducted to meet the pump performance requirements. The pump performance is validated by performing simulation study with finite element analysis (FEA). In addition, a prototype pump is fabricated by using a piezoelectric actuator. A PID position feedback controller is implemented, and experimental investigations are carried out for performance test of the precision pump with the help of a microscope.

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Correspondence to Qingsong Xu .

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Xu, Q. (2018). Design, Analysis, and Development of a Piezoelectric Microsyringe Pump. In: Micromachines for Biological Micromanipulation. Springer, Cham. https://doi.org/10.1007/978-3-319-74621-0_9

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  • DOI: https://doi.org/10.1007/978-3-319-74621-0_9

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-74620-3

  • Online ISBN: 978-3-319-74621-0

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