Abstract
To utilize intense X-ray pulse sources for scientific researches and industrial applications, it is important to study the damage mechanism caused by X-ray irradiation . The soft X-ray laser (SXRL) pulses can make damages on an extreme ultraviolet (EUV) multilayer mirror . When the SXRL pulse irradiates onto the EUV multilayer mirror, a part of input energy is reflected. The SXRL beam irradiated to a damage part, in this case, the reflected intensity is modified. If the pulse width is longer than process time of damage growth, we can observe the modulated intensity, which has been affected by the damage structure formed by the former part of duration. Then, it will be possible to confirm the start time of damage formation in the multilayer structure by use of X-ray streak camera technique.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Ishino, M., et al.: Nanoscale surface modifications and formation of conical structures at aluminum surface induced by single shot exposure of soft X-ray laser pulse. J. Appl. Phys. 109, 013504 (2011)
Ishino, M., et al.: Observations of surface modifications induced by the multiple pulse irradiation using a soft picosecond X-ray laser beam. Appl. Phys. A 110, 179–188 (2013)
Ishino, M., et al.: Very low electron temperature in warm dense matter formed by focused picosecond soft X-ray laser pulses. J. Appl. Phys. 116, 183302 (2014)
Norman, G., et al.: Nanomodification of gold surface by picosecond soft X-ray laser pulse. J. Appl. Phys. 112, 013104 (2012)
Hecht, E.: Optics, 3rd edn. Addison-Wesley (1998)
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2018 Springer International Publishing AG
About this paper
Cite this paper
Ishino, M., Ichimaru, S., Hatayama, M., Hasegawa, N., Oku, S., Nishikino, M. (2018). Analysis of Reflection Signal from EUV Multilayer Mirror for Irradiation-Induced Damage Study. In: Kawachi, T., Bulanov, S., Daido, H., Kato, Y. (eds) X-Ray Lasers 2016. ICXRL 2016. Springer Proceedings in Physics, vol 202. Springer, Cham. https://doi.org/10.1007/978-3-319-73025-7_47
Download citation
DOI: https://doi.org/10.1007/978-3-319-73025-7_47
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-73024-0
Online ISBN: 978-3-319-73025-7
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)