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Structure and Properties of Chalcogenide Materials for PCM

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Book cover Phase Change Memory

Abstract

Performances of phase change memories (PCMs) are intimately linked to the properties of the integrated phase change material, and huge research efforts are devoted to optimize materials for specific memory applications. The outstanding properties of chalcogenide phase change materials are reviewed in this chapter. The structural and physical properties of the amorphous and crystalline states are illustrated by focusing on two prototypical phase change alloys (Ge2Sb2Te5 and GeTe). The origin of the electrical contrast between the amorphous and crystalline states of phase change materials and the nature of the crystallization mechanisms are also discussed. Then, focus is placed on material science issues related with current technological challenges met by PCMs. In particular, we show how dopants affect the structure of the amorphous phase and enhance its stability, and we examine the link between the resistance drift of the amorphous state and structural changes occurring during aging. Finally we show how interface and oxidation effects affect the crystallization temperature and crystallization mechanism.

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Abbreviations

AIMD:

Ab initio molecular dynamics

AIST:

Ag- and In-doped Sb2Te

ALD:

Atomic layer deposition

CD-RW:

Compact disc rewritable

CMOS:

Complementary metal-oxide-semiconductor

CN:

Coordination number

CVD:

Chemical vapor deposition

DC:

Direct current

DCD:

Diffractive coherent domain

DFT:

Density functional theory

DoS :

Density of states

DRAM:

Dynamic random access memory

DSC:

Differential scanning calorimetry

DVD:

Digital versatile disc

DVD-RAM:

Digital versatile disc random access memory

DVD-RW:

Digital versatile disc rewritable

EXAFS:

Extended X-ray absorption fine structure

fcc:

Face-centered cubic

FTIR:

Fourier-transform infrared spectroscopy

FWHM:

Full width at half maximum

GST:

Alloys located on the pseudo-binary line connecting GeTe and Sb2Te3 in the ternary Ge-Sb-Te phase diagram

MD:

Molecular dynamics

MLC:

Multilevel cell

MOCVD:

Metal-organic chemical vapor deposition

PCM:

Phase change memory

PCRAM:

Phase change random access memory

PDF:

Pair distribution function

PECVD:

Plasma-enhanced chemical vapor deposition

PVD:

Physical vapor deposition

RAM :

Random access memory

RF:

Radio frequency

SEM:

Scanning electron microscopy

STEM:

Scanning transmission electron microscopy

TEM:

Transmission electron microscopy

T g :

Glass transition temperature

T melt :

Melting temperature

T x :

Crystallization temperature

VDoS:

Vibrational density of states

XANES :

X-ray absorption near-edge structure

XAS :

X-ray absorption spectroscopy

References

  1. J. Akola, R.O. Jones, Phys. Rev. B 76, 235201 (2007)

    Article  Google Scholar 

  2. J. Akola, R.O. Jones, Phys. Rev. B 79, 134118 (2009)

    Article  Google Scholar 

  3. J. Akola, J. Larrucea, R.O. Jones, Phys. Rev. B 83, 094113 (2011)

    Article  Google Scholar 

  4. J. Akola, R.O. Jones, Phys. Status Solidi B 249, 1851 (2012)

    Article  Google Scholar 

  5. C.A. Angell, Science 267, 1924 (1995)

    Article  Google Scholar 

  6. C.A. Angell, C.T. Moynihan, M. Hemmati, J. Non-Cryst. Solids 274, 319 (2000)

    Google Scholar 

  7. S.K. Bahl, K.L. Chopra, J. Appl. Phys. 40, 4940 (1969)

    Article  Google Scholar 

  8. S.K. Bahl, K.L. Chopra, J. Appl. Phys. 41, 2196 (1970)

    Article  Google Scholar 

  9. G. Baldi, A. Fontana, G. Monaco, L. Orsingher, S. Rols, F. Rossi, B. Ruta, Phys. Rev. Lett. 102, 195502 (2009)

    Article  Google Scholar 

  10. G.B. Beneventi, L. Perniola, A. Fantini, D. Blachier, A. Toffoli, E. Gourvest, S. Maitrejean, V. Sousa, C. Jahan, J.F. Nodin, A. Persico, S. Loubriat, A. Roule, S. Lhostis, H. Feldis, G. Reimbold, T. Billon, B. De Salvo, L. Larcher, P. Pavan, D. Bensahel, P. Mazoyer, R. Annunziata, F. Boulanger, Proc. Eur. Solid State Device Res. Conf. ESSDERC 2010, 313 (2010)

    Google Scholar 

  11. G. Betti Beneventi, L. Perniola, V. Sousa, E. Gourvest, S. Maitrejean, J.C. Bastien, A. Bastard, B. Hyot, A. Fargeix, C. Jahan, J.F. Nodin, A. Persico, A. Fantini, D. Blachier, A. Toffoli, S. Loubriat, A. Roule, S. Lhostis, H. Feldis, G. Reimbold, T. Billon, B. De Salvo, L. Larcher, P. Pavan, D. Bensahel, P. Mazoyer, R. Annunziata, P. Zuliani, F. Boulanger, Solid State Electron. 197, 65–66 (2011)

    Google Scholar 

  12. V. Bragaglia, F. Arciprete, W. Zhang, A.M. Mio, E. Zallo, K. Perumal, A. Giussani, S. Cecchi, J.E. Boschker, H. Riechert, S. Privitera, E. Rimini, R. Mazzarello, R. Calarco, Sci Rep 6, 23843 (2015)

    Article  Google Scholar 

  13. M. J. Breitwisch, in Phase Change Materials: Science and Applications, ed. by S. Raoux, M. Wuttig (Springer, New York, 2009), pp. 381–408

    Google Scholar 

  14. G. Bruns, P. Merkelbach, C. Schlockermann, M. Salinga, M. Wuttig, T.D. Happ, J.B. Philipp, M. Kund, Appl. Phys. Lett. 95, 043108 (2009)

    Article  Google Scholar 

  15. G.W. Burr, M.J. Breitwisch, M. Franceschini, D. Garetto, K. Gopalakrishnan, B. Jackson, B. Kurdi, C. Lam, L.a. Lastras, A. Padilla, B. Rajendran, S. Raoux, R.S. Shenoy, J. Vac. Sci. Technol. B: Microelectron. Nanom. Struct. 28, 223 (2010)

    Article  Google Scholar 

  16. M.A. Caldwell, S. Raoux, R.Y. Wang, H.-S.P. Wong, D.J. Milliron, J. Mater. Chem. 20, 1285 (2010)

    Article  Google Scholar 

  17. S. Caravati, M. Bernasconi, T.D. Kühne, M. Krack, M. Parrinello, Appl. Phys. Lett. 91, 171906 (2007)

    Article  Google Scholar 

  18. E. Carria, A.M. Mio, S. Gibilisco, M. Miritello, F. d’Acapito, M.G. Grimaldi, E. Rimini, Electrochem. Solid-State Lett. 14, H480 (2011)

    Google Scholar 

  19. S. Caravati, D. Colleoni, R. Mazzarello, T.D. Kühne, M. Krack, M. Bernasconi, M. Parrinello, J. Phys. Condens. Matter 23, 265801 (2011)

    Article  Google Scholar 

  20. T. Chatterji, C.M.N. Kumar, U.D. Wdowik, Phys. Rev. B 91, 054110 (2015)

    Article  Google Scholar 

  21. T. Chattopadhyay, J.X. Boucherle, H.G.v. Schnering, J. Phys. C Solid State Phys. 20, 1431 (1987)

    Article  Google Scholar 

  22. M. Chen, K.A. Rubin, R.W. Barton, Appl. Phys. Lett. 49, 502 (1986)

    Article  Google Scholar 

  23. H.Y. Cheng, T.H. Hsu, S. Raoux, J.Y. Wu, P.Y. Du, M. Breitwisch, Y. Zhu, E.K. Lai, E. Joseph, S. Mittal, R. Cheek, a. Schrott, S.C. Lai, H.L. Lung, C. Lam, IEEE Int. Electron Devices Meet. 2011, 3. 4, 1 (2011)

    Google Scholar 

  24. A.I. Chumakov, G. Monaco, A. Monaco, W.A. Crichton, A. Bosak, R. Rüffer, A. Meyer, F. Kargl, L. Comez, D. Fioretto, H. Giefers, S. Roitsch, G. Wortmann, M.H. Manghnani, A. Hushur, Q. Williams, J. Balogh, K. Parlinski, P. Jochym, P. Piekarz, Phys. Rev. Lett. 106, 225501 (2011)

    Article  Google Scholar 

  25. E. Cho, S. Han, D. Kim, H. Horii, H.S. Nam, J. Appl. Phys. 109, 1 (2011)

    Google Scholar 

  26. J.L.F. Da Silva, A. Walsh, H. Lee, Phys. Rev. B 78, 224111 (2008)

    Article  Google Scholar 

  27. V.L. Deringer, W. Zhang, M. Lumeij, S. Maintz, M. Wuttig, R. Mazzarello, R. Dronskowski, Angew. Chem. Int. Ed. 53, 10817 (2014)

    Article  Google Scholar 

  28. V.L. Deringer, R. Dronskowski, M. Wuttig, Adv. Funct. Mater. 25, 6343 (2015)

    Article  Google Scholar 

  29. K. Do, D. Lee, D.H. Ko, H. Sohn, M.H. Cho, Electrochem. Solid-State Lett. 13, H284 (2010)

    Article  Google Scholar 

  30. A.H. Edwards, A.C. Pineda, P.a. Schultz, M.G. Martin, A.P. Thompson, H.P. Hjalmarson, C.J. Umrigar, Phys. Rev. B 73, 045210 (2006)

    Article  Google Scholar 

  31. T. Egami , S.J.L Billinge, Underneath the Bragg peaks, Structural Analysis of Complex Materials, ed. By R.W. Cahn (Elsevier, Pergamon Materials Series Oxford, 2003)

    Google Scholar 

  32. J.M. van Eijk, Structural Analysis of Phase-Change Materials Using X-Ray Absorption Measurements (RWTH Aachen University, PhD thesis, 2010.) http://publications.rwth-aachen.de/record/64226/files/3595.pdf

    Google Scholar 

  33. R. Fallica, E. Varesi, L. Fumagalli, S. Spadoni, M. Longo, C. Wiemer, Phys. Status Solidi - Rapid. Res. Lett. 7, 1107 (2013)

    Google Scholar 

  34. A. Fantini, L. Perniola, M. Armand, J.F. Nodin, V. Sousa, A. Persico, J. Cluzel, C. Jahan, S. Maitrejean, S. Lhostis, A. Roule, C. Dressler, G. Reimbold, B. DeSalvo, P. Mazoyer, D. Bensahel, F. Boulanger, Proc. Int. Memory Workshop 2009, 66–67 (2009)

    Google Scholar 

  35. A. Fantini, V. Sousa, L. Perniola, E. Gourvest, J.C. Bastien, S. Maitrejean, S. Braga, N. Pashkov, A. Bastard, B. Hyot, A. Roule, A. Persico, H. Feldis, C. Jahan, J.F. Nodin, D. Blachier, A. Toffoli, G. Reimbold, F. Fillot, F. Pierre, R. Annunziata, D. Benshael, P. Mazoyer, C. Vallée, T. Billon, J. Hazart, B. De Salvo, F. Boulanger, Tech. Dig. - Int. Electron devices meet. IEDM 104, 644 (2010)

    Google Scholar 

  36. P. Fantini, M. Ferro, A. Calderoni, S. Brazzelli, Appl. Phys. Lett. 100, 213506 (2012)

    Article  Google Scholar 

  37. M.H. Flores-Ruiz, G.G. Naumis, J. Chem. Phys. 131, 154501 (2009)

    Google Scholar 

  38. P. Fons, T. Matsunaga, A.V. Kolobov, M. Krbal, J. Tominaga, N. Yamada, Phys. Status Solidi B 249, 1919 (2012)

    Article  Google Scholar 

  39. I. Friedrich, V. Weidenhof, W. Njoroge, P. Franz, M. Wuttig, J. Appl. Phys. 87, 4130 (2000)

    Article  Google Scholar 

  40. S. Gabardi, S. Caravati, G.C. Sosso, J. Behler, M. Bernasconi, Phys. Rev. B 92, 054201 (2015)

    Article  Google Scholar 

  41. J.P. Gaspard, A. Pellegatti, F. Marinelli, C. Bichara, Philos. Mag. B 77, 727 (1998)

    Google Scholar 

  42. J.P. Gaspard, Comptes Rendus Physique 17, 389 (2016)

    Article  Google Scholar 

  43. G.E. Ghezzi, J.Y. Raty, S. Maitrejean, A. Roule, E. Elkaim, F. Hippert, Appl. Phys. Lett. 99, 151906 (2011)

    Article  Google Scholar 

  44. G.E. Ghezzi, R. Morel, A. Brenac, N. Boudet, M. Audier, F. Fillot, S. Maitrejean, F. Hippert, Appl. Phys. Lett. 101, 233113 (2012)

    Article  Google Scholar 

  45. G.E. Ghezzi, P. Noé, M. Marra, C. Sabbione, F. Fillot, N. Bernier, J. Ferrand, S. Maîtrejean, F. Hippert, Appl. Phys. Lett. 104, 221605 (2014)

    Article  Google Scholar 

  46. J. González-Hernández, E. Prokhorov, Y. Vorobiev, J. Vac. Sci. Technol. A 18, 1694 (2000)

    Article  Google Scholar 

  47. E. Gourvest, B. Pelissier, C. Vallée, A. Roule, S. Lhostis, S. Maitrejean, J. Electrochem. Soc. 159, H373 (2012)

    Google Scholar 

  48. J. Hegedüs, S.R. Elliott, Nat. Mater. 7, 399 (2008)

    Article  Google Scholar 

  49. Q. Hubert, C. Jahan, V. Sousa, L. Perniola, A. Kusiak, J.L. Battaglia, P. Noé, M. Bernard, M. Tessaire, F. Pierre, P. Zuliani, R. Annunziata, G. Pananakakis, B. De Salvo, International Conference on Solid State Devices and Materials 306, 550–551 (2013)

    Google Scholar 

  50. Q. Hubert, C. Jahan, A. Toffoli, G. Navarro, S. Chandrashekar, P. Noé, D. Blachier, V. Sousa, L. Perniola, J.F. Nodin, A. Persico, R. Kies, S. Maitrejean, A. Roule, E. Henaff, M. Tessaire, P. Zuliani, R. Annunziata, G. Pananakakis, G. Reimbold, and B. De Salvo, 4th IEEE Int. Mem. Work. IMW 2012, pp. 1–4 (2012)

    Google Scholar 

  51. D. Ielmini, Y. Zhang, J. Appl. Phys. 102, 054517 (2007)

    Article  Google Scholar 

  52. D. Ielmini, S. Lavizzari, D. Sharma, A.L. Lacaita, Appl. Phys. Lett. 92, 193511 (2008)

    Article  Google Scholar 

  53. D. Ielmini, M. Boniardi, A.L. Lacaita, A. Redaelli, A. Pirovano, Microelectron. Eng. 86, 1942 (2009)

    Article  Google Scholar 

  54. H. Iwasaki, Y. Ide, M. Harigaya, Y. Kageyama, I. Fujimura, Jpn, J. Appl. Phys. 31., Part 1, 2B, 461–465 (1992)

    Article  Google Scholar 

  55. R. Jeyasingh, S.W. Fong, J. Lee, Z. Li, K.W. Chang, D. Mantegazza, M. Asheghi, K.E. Goodson, H.S.P. Wong, Nano Lett. 14, 3419 (2014)

    Article  Google Scholar 

  56. Global Standards for the Microelectronics Industry (2004).[Online]. Available: http://www.jedec.org

  57. T.H. Jeong, M.R. Kim, H. Seo, S.J. Kim, S.Y. Kim, J. Appl. Phys. 86, 774 (1999)

    Article  Google Scholar 

  58. T.H. Jeong, M.R. Kim, H. Seo, J.W. Park, C. Yeon, J. Japanese, Appl. Physics 39, 2775 (2000)

    Google Scholar 

  59. P. Jóvári, I. Kaban, J. Steiner, B. Beuneu, A. Schöps, M.A. Webb, Phys. Rev. B 77, 035202 (2008)

    Article  Google Scholar 

  60. M.-C. Jung, Y.M. Lee, H.-D. Kim, M.G. Kim, H.J. Shin, K.H. Kim, S.A. Song, H.S. Jeong, C.H. Cho, M. Han, Appl. Phys. Lett. 91, 083514 (2007)

    Article  Google Scholar 

  61. J.A. Kalb, F. Spaepen, M. Wuttig, Appl. Phys. Lett. 84, 5240 (2004)

    Google Scholar 

  62. J.A. Kalb, C.Y. Wen, F. Spaepen, H. Dieker, M. Wuttig, J. Appl. Phys. 98, 054902 (2005)

    Article  Google Scholar 

  63. J. Kalikka, J. Akola, R.O. Jones, Phys. Rev. B 90, 184109 (2014)

    Article  Google Scholar 

  64. M.J. Kang, T.J. Park, Y.W. Kwon, D.H. Ahn, Y.S. Kang, H. Jeong, S.J. Ahn, Y.J. Song, B.C. Kim, S.W. Nam, H.K. Kang, G.T. Jeong, C.H. Chung, Tech. Dig. - Int. Electron devices meet. IEDM 105(21), 39 (2011)

    Google Scholar 

  65. V.G. Karpov, Y.A. Kryukov, I.V. Karpov, M. Mitra, Phys. Rev. B 78, 052201 (2008)

    Article  Google Scholar 

  66. T. Kato, K. Tanaka, Jpn, J. Appl. Phys. 44, 7340 (2005)

    Article  Google Scholar 

  67. K.F. Kelton, A.L. Greer, Nucleation in Condensed Matter: Applications in Materials and Biology (Elsevier, Pergamon Materials Series, Oxford, UK, 2010)

    Google Scholar 

  68. J.-H. Kim, M.R. Kim, Jpn. J. Appl. Phys. 37(Part 1), 2116 (1998)

    Article  Google Scholar 

  69. K. Kim, J.-C. Park, J.-G. Chung, S.A. Song, M.-C. Jung, Y.M. Lee, H.-J. Shin, B. Kuh, Y. Ha, J.-S. Noh, Appl. Phys. Lett. 89, 243520 (2006)

    Article  Google Scholar 

  70. I.S. Kim, S.L. Cho, D.H. Im, E.H. Cho, D.H. Kim, G.H. Oh, D.H. Ahn, S.O. Park, S.W. Nam, J.T. Moon, and C.H. Chung, Dig. Tech. Pap., 2010 Symp. VLSI Technol., 203 (2010)

    Google Scholar 

  71. K.H. Kim, S.J. Choi, J.G. Chung, J.H. Lee, S. Heo, Jpn. J. Appl. Phys. 49, 0618011 (2010)

    Google Scholar 

  72. S. Kohara, K. Kato, S. Kimura, H. Tanaka, T. Usuki, H. Suzuya, H. Tanaka, Y. Moritomo, T. Matsunaga, N. Yamada, Y. Tanaka, H. Suematsu, M. Takata, Appl. Phys. Lett. 89, 201910 (2006)

    Article  Google Scholar 

  73. A.V. Kolobov, J. Tominaga, P. Fons, T. Uruga, Appl. Phys. Lett. 82, 382 (2003)

    Article  Google Scholar 

  74. A. Kolobov, P. Fons, A. Frenkel, A. Ankudinov, J. Tominaga, T. Uruga, Nat. Mater. 3, 703 (2004)

    Article  Google Scholar 

  75. A.V. Kolobov, P. Fons, J. Tominaga, A.L. Ankudinov, S.N. Yannopoulos, K.S. Andrikopoulos, J. Phys. Condens. Matter 16, S5103 (2004)

    Article  Google Scholar 

  76. A.V. Kolobov, P. Fons, J. Tominaga, A.I. Frenkel, A.L. Ankudinov, S.N. Yannopoulos, K.S. Andrikopoulos, T. Uruga, Jpn. J. Appl. Phys. 44, 3345 (2005)

    Article  Google Scholar 

  77. A.V. Kolobov, J. Tominaga, Chalcogenides Metastability and Phase Change Phenomena, vol 164 (Springer series In Materials Science, Berlin, 2012)

    Google Scholar 

  78. A. V. Kolobov (ed.), Phase-change memory: Science and Applications special issue. Phys. Status Solidi B 249(10), 1817–2048 (2012)

    Google Scholar 

  79. A.V. Kolobov, P. Fons, B. Hyot, B. André, J. Tominaga, Y. Tamenori, H. Yoshikawa, K. Kobayashi, Appl. Phys. Lett. 100, 061910 (2012)

    Article  Google Scholar 

  80. A.V. Kolobov, P. Fons, J. Tominaga, Phys. Rev. B 87, 155204 (2013)

    Article  Google Scholar 

  81. B.J. Kooi, J.T.M. De Hosson, J. Appl. Phys. 92, 3584 (2002)

    Article  Google Scholar 

  82. U. Köster, Mater. Sci. Eng. 97, 233 (1988)

    Article  Google Scholar 

  83. M. Krbal, A.V. Kolobov, P. Fons, J. Tominaga, S.R. Elliott, J. Hegedus, T. Uruga, Phys. Rev. B 83, 054203 (2011)

    Article  Google Scholar 

  84. M. Krbal, A.V. Kolobov, P. Fons, K.V. Mitrofanov, Y. Tamenori, J. Hegedüs, S.R. Elliott, J. Tominaga, Appl. Phys. Lett. 102, 111904 (2013)

    Article  Google Scholar 

  85. A. Kusiak, J.-L. Battaglia, P. Noé, V. Sousa, F. Fillot, J. Phys. Conf. Ser. 745, 032104 (2016)

    Article  Google Scholar 

  86. P. La Fata, F. Torrisi, S. Lombardo, G. Nicotra, R. Puglisi, E. Rimini, J. Appl. Phys. 105, 083546 (2009)

    Article  Google Scholar 

  87. B.S. Lee, J.R. Abelson, S.G. Bishop, D.H. Kang, B.K. Cheong, K.B. Kim, J. Appl. Phys. 97, 093509 (2005)

    Article  Google Scholar 

  88. B.-S. Lee, S. G. Bishop, in Phase Change Materials – Science and Applications, ed. by S. Raoux and M. Wuttig (Springer US, 2009), pp. 175–198. DOI: 10.1007/978-0-387-84874-7

  89. M. Lee, H.J. Shin, S.J. Choi, J.H. Oh, H.S. Jeong, K. Kim, M.-C. Jung, Curr. Appl. Phys. 11, 710 (2011)

    Article  Google Scholar 

  90. T.H. Lee, D. Loke, S.R. Elliott, Adv. Mater. 27, 5477–5483 (2015)

    Article  Google Scholar 

  91. D. Lencer, M. Salinga, B. Grabowski, T. Hickel, J. Neugebauer, M. Wuttig, Nat. Mater. 7, 972 (2008)

    Article  Google Scholar 

  92. D. Lencer, M. Salinga, M. Wuttig, Adv. Mater. 23, 2030 (2011)

    Article  Google Scholar 

  93. J.M. Li, H.X. Yang, K.G. Lim, Appl. Phys. Lett. 100, 1 (2012)

    Google Scholar 

  94. J. Li, B. Luan and C. Lam, 2012 IEEE International Reliability Physics Symposium (IRPS), Anaheim, CA, (2012), pp. 6C.1.1–6C.1.6

    Google Scholar 

  95. R.G. Liang, C.B. Peng, K. Nagata, K. Daly-Flynn, M. Mansuripur, Appl. Opt. 41, 370–378 (2002)

    Article  Google Scholar 

  96. X.Y. Liu, J. Chem. Phys. 112, 9949 (2000)

    Article  Google Scholar 

  97. J. Luckas, A. Olk, P. Jost, H. Volker, J. Alvarez, A. Jaffré, P. Zalden, A. Piarristeguy, A. Pradel, C. Longeaud, M. Wuttig, Appl. Phys. Lett. 105, 092108 (2014)

    Article  Google Scholar 

  98. Y. Maeda, M. Wakagi, Jpn. J. Appl. Phys. 30(1), 101–106 (1991)

    Article  Google Scholar 

  99. Chapters 15–18 in Molecular Dynamics Simulations of Disordered Materials: From Network Glasses to Phase-Change Memory Alloys, Ed. By Carlo Massobrio, Jincheng Du, Marco Bernasconi, Philip S. Salmon (Springer Series in Materials Science 215, Springer International Publishing, Switzerland, 2015)

    Google Scholar 

  100. T. Matsunaga, N. Yamada, Phys. Rev. B 69, 104111 (2004)

    Article  Google Scholar 

  101. T. Matsunaga, N. Yamada, Y. Kubota, Acta Crystallogr. Sect. B Struct. Sci. 60, 685 (2004)

    Article  Google Scholar 

  102. T. Matsunaga, R. Kojima, N. Yamada, K. Kifune, Y. Kubota, Y. Tabata, M. Takata, Inorg. Chem. 45, 2235 (2006)

    Article  Google Scholar 

  103. T. Matsunaga, H. Morita, R. Kojima, N. Yamada, K. Kifune, Y. Kubota, Y. Tabata, J.J. Kim, M. Kobata, E. Ikenaga, K. Kobayashi, J. Appl. Phys. 103, 093511 (2008)

    Article  Google Scholar 

  104. R. Mazzarello, S. Caravati, S. Angioletti-Uberti, M. Bernasconi, M. Parrinello, Phys. Rev. Lett. 104, 085503 (2010)

    Article  Google Scholar 

  105. R.E. Meinders, A.V. Mijiritskii, L. van Pieterson, M. Wuttig, Optical Data Storage – Phase-Change Media and Recording (Springer, Netherlands, 2006)

    Google Scholar 

  106. X.S. Miao, T.C. Chong, Y.M. Huang, K.G. Lim, P.K. Tan, L.P. Shi, Jpn. J. Appl. Phys. 38, 1638 (1999)

    Article  Google Scholar 

  107. M. Micoulaut, J.Y. Raty, C. Otjacques, C. Bichara, Phys. Rev.B 81, 174206 (2010)

    Article  Google Scholar 

  108. M. Mitra, Y. Jung, D.S. Gianola, R. Agarwal, Appl. Phys. Lett. 96, 222111 (2010)

    Article  Google Scholar 

  109. K.V. Mitrofanov, A.V. Kolobov, P. Fons, X. Wang, J. Tominaga, Y. Tamenori, T. Uruga, N. Ciocchini, D. Ielmini, Appl. Phys. 115, 173501 (2014)

    Article  Google Scholar 

  110. L.J. Moore, D.R. MacFarlane, P.J. Newman, J. Non-Cryst. Solids 140, 159 (1992)

    Article  Google Scholar 

  111. S. Mukhopadhyay, J. Sun, A. Subedi, T. Siegrist, D.J. Singh, Sci Rep 6, 25981 (2016)

    Article  Google Scholar 

  112. G. Navarro, V. Sousa, A. Persico, N. Pashkov, A. Toffoli, J.C. Bastien, L. Perniola, S. Maitrejean, A. Roule, P. Zuliani, R. Annunziata, B. De Salvo, Solid State Electron. 89, 93 (2013)

    Google Scholar 

  113. G.G. Naumis, H.M. Flores-Ruiz, Phys. Rev. B 78, 094203 (2008)

    Article  Google Scholar 

  114. W.K. Njoroge, H.-W. Wöltgens, M. Wuttig, J. Vac. Sci. Technol. A 20(1), 230 (2002)

    Article  Google Scholar 

  115. P. Noé, C. Sabbione, N. Castellani, G. Veux, G. Navarro, V. Sousa, F. Hippert, F. d’Acapito, J. Phys. D. Appl. Phys. 49, 035305 (2016)

    Article  Google Scholar 

  116. P. Noé, C. Sabbione, N. Bernier, N. Castellani, F. Fillot, F. Hippert, Acta Mater. 110, 142 (2016)

    Article  Google Scholar 

  117. T. Nonaka, G. Ohbayashi, Y. Toriumi, Y. Mori, H. Hashimoto, Thin Solid Films 370, 258 (2000)

    Article  Google Scholar 

  118. K. Ohara, L. Temleitner, K. Sugimoto, S. Kohara, T. Matsunaga, L. Pusztai, M. Itou, H. Ohsumi, R. Kojima, N. Yamada, T. Usuki, A. Fujiwara, M. Takata, Adv. Funct. Mater. 22, 2251 (2012)

    Article  Google Scholar 

  119. N. Ohshima, J. Appl. Phys. 79, 8357 (1996)

    Article  Google Scholar 

  120. J.K. Olson, H. Li, T. Ju, J.M. Viner, P.C. Taylor, J. Appl. Phys. 99, 103508 (2006)

    Article  Google Scholar 

  121. J. Orava, T. Wagner, J. Sik, J. Prikryl, M. Frumar, L. Benes, J. Appl. Phys. 104, 43523 (2008)

    Article  Google Scholar 

  122. J. Orava, a.L. Greer, B. Gholipour, D.W. Hewak, C.E. Smith, Nat. Mater. 11, 279 (2012)

    Article  Google Scholar 

  123. J. Orava, D.W. Hewak, A.L. Greer, Adv. Funct. Mater. 25, 4851 (2015)

    Google Scholar 

  124. M.A. Otooni, Science and Technology of Rapid Solidification and Processing (NATO Science Series E vol. 278, Springer, Netherlands, (2012)

    Google Scholar 

  125. S.R. Ovshinsky, Phys. Rev. Lett. 21, 1450 (1968)

    Article  Google Scholar 

  126. J.-W. Park, S.H. Eom, H. Lee, J.L.F. Da Silva, Y.-S. Kang, T.-Y. Lee, Y.H. Khang, Phys. Rev. B 80, 115209 (2009)

    Article  Google Scholar 

  127. L. Pauling, Nature of Chemical Bond (Cornell Univ. Press, New York, 1939)

    Google Scholar 

  128. C. Peng, L. Wu, F. Rao, Z. Song, X. Zhou, M. Zhu, B. Liu, D. Yao, S. Feng, P. Yang, J. Chu, Scr. Mater. 65, 327 (2011)

    Article  Google Scholar 

  129. L. Perniola, V. Sousa, A. Fantini, E. Arbaoui, A. Bastard, M. Armand, A. Fargeix, C. Jahan, J.F. Nodin, A. Persico, D. Blachier, A. Toffoli, S. Loubriat, E. Gourvest, G. Betti Beneventi, H. Feldis, S. Maitrejean, S. Lhostis, A. Roule, O. Cueto, G. Reimbold, L. Poupinet, T. Billon, B. De Salvo, D. Bensahel, P. Mazoyer, R. Annunziata, P. Zuliani, F. Boulanger, IEEE Electron Device Lett. 31, 488 (2010)

    Article  Google Scholar 

  130. A. Pirovano, A.L. Lacaita, F. Pellizzer, S.A. Kostylev, A. Benvenuti, R. Bez, IEEE Trans. on Electr. Devices 51, 714 (2004)

    Article  Google Scholar 

  131. S. Privitera, E. Rimini, R. Zonca, Appl. Phys. Lett. 85, 3044 (2004)

    Article  Google Scholar 

  132. M. Putero, M.-V. Coulet, C. Muller, C. Baethz, S. Raoux, H.-Y. Cheng, Appl. Phys. Lett. 108, 101909 (2016)

    Article  Google Scholar 

  133. S. Raoux, J.L. Jordan-Sweet, A.J. Kellock, J. Appl. Phys. 103, 114310 (2008)

    Article  Google Scholar 

  134. S. Raoux, C. Cabral Jr., L. Krusin-Elbaum, J.L. Jordan-Sweet, K. Virwani, M. Hitzbleck, M. Salinga, A. Madan, T.L. Pinto, J. Appl. Phys. 105, 064918 (2009)

    Article  Google Scholar 

  135. Phase Change Materials – Science and Applications, ed. by S. Raoux and M. Wuttig (Springer (2009)

    Google Scholar 

  136. S. Raoux, H.-Y. Cheng, B. Muñoz, J.L. Jordan-Sweet, Proc. Eur. Phase Chang. Ovonic Sci. Symp. 2009, 91 (2009)

    Google Scholar 

  137. S. Raoux, H.Y. Cheng, M.A. Caldwell, H.S.P. Wong, Appl. Phys. Lett. 95, 071910 (2009)

    Article  Google Scholar 

  138. S. Raoux, A.K. Konig, H.Y. Cheng, D. Garbin, R.W. Cheek, J.L. Jordan-Sweet, M. Wuttig, Phys. Status Solidi B 249, 1999 (2012)

    Google Scholar 

  139. J.-Y. Raty, C. Otjacques, J.-P. Gaspard, C. Bichara, Solid State Sci. 12, 193 (2010)

    Article  Google Scholar 

  140. J.Y. Raty, P. Noé, G. Ghezzi, S. Maîtrejean, C. Bichara, F. Hippert, Phys. Rev. B 88, 014203 (2013)

    Article  Google Scholar 

  141. J.Y. Raty, W. Zhang, J. Luckas, C. Chen, R. Mazzarello, C. Bichara, M. Wuttig, Nat. Commun. 6, 1 (2015)

    Article  Google Scholar 

  142. J.J. Rehr, Rev. Mod. Phys. 72, 621 (2000)

    Article  Google Scholar 

  143. J. Robertson, B. Huang, Phys. Status Solidi B 249, 1867 (2012)

    Article  Google Scholar 

  144. I. Ronneberger, W. Zhang, H. Eshet, R. Mazzarello, Adv. Funct. Mater. 25, 6407 (2015)

    Article  Google Scholar 

  145. M. Rizzi, A. Spessot, P. Fantini, D. Ielmini, Appl. Phys. Lett. 99, 223513 (2011)

    Article  Google Scholar 

  146. M. Salinga, E. Carria, A. Kaldenbach, M. Bornhöfft, J. Benke, J. Mayer, M. Wuttig, Nat. Commun. 4, 2371 (2013)

    Article  Google Scholar 

  147. A. Schlieper, Y. Feutelais, S.G. Fries, B. Legendre, R. Blachnik, Calphad 23(1), 1 (1999)

    Article  Google Scholar 

  148. A. Sebastian, M. Le Gallo, D. Krebs, Nat. Commun. 5, 1 (2014)

    Article  Google Scholar 

  149. R.M. Shelby, S. Raoux, J. Appl. Phys. 105, 104902 (2009)

    Google Scholar 

  150. K. Shportko, S. Kremers, M. Woda, D. Lencer, J. Robertson, M. Wuttig, Nat. Mater. 7, 653 (2008)

    Article  Google Scholar 

  151. T. Siegrist, P. Jost, H. Volker, M. Woda, P. Merkelbach, C. Schlockermann, M. Wuttig, Nat. Mater. 10, 202 (2011)

    Article  Google Scholar 

  152. R.E. Simpson, M. Krbal, P. Fons, A.V. Kolobov, J. Tominaga, T. Uruga, H. Tanida, Nano Lett. 10, 414419 (2010)

    Article  Google Scholar 

  153. D.J. Singh, J. Appl. Phys. 113, 203101 (2013)

    Article  Google Scholar 

  154. G.C. Sosso, G. Miceli, S. Caravati, F. Giberti, J. Behler, M. Bernasconi, J. Phys. Chem. Lett. 4, 4241 (2013)

    Article  Google Scholar 

  155. G.C. Sosso, M. Salvalaglio, J. Behler, M. Bernasconi, M. Parrinello, J. Phys. Chem. C 119, 6428 (2015)

    Article  Google Scholar 

  156. V. Sousa, G. Navarro, N. Castellani, M. Coue, O. Cueto, C. Sabbione, P. Noe, L. Perniola, S. Blonkowski, P. Zuliani, R. Annunziata, Dig. Tech. Pap. - Symp. VLSI Technol. 2015, T98 (2015)

    Google Scholar 

  157. J.R. Stellhorn, S. Hosokawa, W.-C. Pilgrim, N. Blanc, N. Boudet, H. Tajiri, S. Kohara, Phys. Status Solidi B 253, 1038 (2016)

    Article  Google Scholar 

  158. Z. Sun, J. Zhou, R. Ahuja, Phys. Rev. Lett. 96, 1 (2006)

    Google Scholar 

  159. J. Tominaga, T. Nakano, N. Atoda, Jpn. J. Appl. Phys. 37, 1852 (1998)

    Article  Google Scholar 

  160. W. Wang, D. Loke, L. Shi, R. Zhao, H. Yang, L.-T. Law, L.-T. Ng, K.-G. Lim, Y.-C. Yeo, T.-C. Chong, A.L. Lacaita, Sci Rep 2, 360 (2012)

    Article  Google Scholar 

  161. X. Wei, L. Shi, T.C. Chong, R. Zhao, L.H. Koon, Jpn. J. Appl. Phys. 46, 2211 (2007)

    Article  Google Scholar 

  162. W. Wełnic, S. Botti, L. Reining, M. Wuttig, Phys. Rev. Lett. 98, 236403 (2007)

    Article  Google Scholar 

  163. M. Wimmer, M. Kaes, C. Dellen, M. Salinga, Front. Phys. 2, 75–71 (2014)

    Article  Google Scholar 

  164. M. Wuttig, N. Yamada, Nat. Mater. 6, 824 (2007)

    Article  Google Scholar 

  165. M. Wuttig, D. Lüsebrink, D. Wamwangi, W. Wełnic, M. Gillessen, R. Dronskowski, Nat. Mater. 6, 122 (2007)

    Article  Google Scholar 

  166. L. Xu, L. Tong, L. Geng, F. Yang, J. Xu, W. Su, D. Liu, Z. Ma, K. Chen, J. Appl. Phys. 110, 013703 (2011)

    Article  Google Scholar 

  167. N. Yamada, E. Ohno, N. Akahira, K. Nishiuchi, K. Nagat, M. Takao, Jpn. J. Appl. Phys. 26. Supplement 61, 26–24 (1987)

    Google Scholar 

  168. N. Yamada, E. Ohno, K. Nishiuchi, N. Akahira, M. Takao, J. Appl. Phys. 69, 2849 (1991)

    Google Scholar 

  169. N. Yamada, T. Matsunaga, J. Appl. Phys. 88, 7020 (2000)

    Article  Google Scholar 

  170. N. Yamada, Phys. Status Solidi B 249, 1837 (2012)

    Article  Google Scholar 

  171. L.V. Yashina, R. Püttner, V.S. Neudachina, T.S. Zyubina, V.I. Shtanov, M.V. Poygin, J. Appl. Phys. 103, 094909 (2008)

    Article  Google Scholar 

  172. Y. Yin, H. Zhang, S. Hosaka, Y. Liu, Q. Yu, J. Phys. D. Appl. Phys. 46, 505311 (2013)

    Article  Google Scholar 

  173. P. Zalden, A. von Hoegen, P. Landreman, M. Wuttig, A.M. Lindenberg, Chem. Mater. 27, 5641 (2015)

    Article  Google Scholar 

  174. A.R. Zanatta, I. Chambouleyron, Phys. Rev. B 48, 4560 (1993)

    Article  Google Scholar 

  175. W. Zhang, A. Thiess, P. Zalden, R. Zeller, P.H. Dederichs, J.-Y. Raty, M. Wuttig, S. Blügel, R. Mazzarello, Nat. Mater. 11, 952 (2012)

    Article  Google Scholar 

  176. W. Zhou, L. Wu, X. Zhou, F. Rao, Z. Song, D. Yao, W. Yin, S. Song, B. Liu, B. Qian, S. Feng, Appl. Phys. Lett. 105, 243113 (2014)

    Article  Google Scholar 

  177. X. Zhou, M. Xia, F. Rao, L. Wu, X. Li, Z. Song, S. Feng, H. Sun, ACS Appl. Mater. Interfaces 6, 14207 (2014)

    Article  Google Scholar 

  178. X. Zhou, W. Dong, H. Zhang, R.E. Simpson, Sci Rep 5, 11150 (2015)

    Article  Google Scholar 

  179. F. Zipoli, D. Krebs, A. Curioni, Phys. Rev. B 93, 115201 (2016)

    Article  Google Scholar 

  180. P. Zuliani, E. Varesi, E. Palumbo, M. Borghi, I. Tortorelli, D. Erbetta, G.D. Libera, N. Pessina, A. Gandolfo, C. Prelini, L. Ravazzi, R. Annunziata, IEEE Trans. Electron Devices 60, 4020 (2013)

    Article  Google Scholar 

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Acknowledgments

We thank Dr. J.-Y. Raty (FNRS, University of Liège) for his constant and friendly support and numerous fruitful discussions on phase change material science. P. N. acknowledges the PCM team in LETI. This work has been supported in part by ST-LETI bilateral program A, European 621217-PANACHE project, LabEx MINOS ANR-10-LABX-55-01, and the SESAME project ANR-15-CE24-0021. SOLEIL, ESRF, and the Italian beamline LISA at ESRF are acknowledged for granting synchrotron beam time. Dr. F. D’Acapito (CNR-IOM-OGG c/o ESRF) is also acknowledged for his support during EXAFS experiments, friendship, and outstanding XAS data analysis expertise. We sincerely acknowledge the past and present students and our long-standing close collaborators and also friends who contributed to this work: G.E. Ghezzi, M. Aoukar, M. Marra, P.-D. Szkutnik, P. Kowalczyk, P. Montéléon, C. Sabbione, M. Bernard, L. Fellouh, F. Fillot, N. Bernier, C. Licitra, V. Sousa, G. Navarro, V. Jousseaume, P.-H. Haumesser, and all those we may have forgotten.

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  1. Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France

    Pierre Noé

  2. LNCMI (CNRS, Univ. Grenoble Alpes, UPS, INSA), Grenoble, France

    Françoise Hippert

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  1. Micron Semiconductor Italia S.r.l., Vimercate, Italy

    Andrea Redaelli

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Noé, P., Hippert, F. (2018). Structure and Properties of Chalcogenide Materials for PCM. In: Redaelli, A. (eds) Phase Change Memory. Springer, Cham. https://doi.org/10.1007/978-3-319-69053-7_6

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