Abstract
Here we present the design of an amorphous silicon photodetector integrated with an ion-exchanged waveguide on the same glass substrate in order to obtain an evanescent waveguide sensor for on-chip biomolecular recognition in Lab-on-Chip applications. We studied the behaviour of a monochromatic light in a channel waveguide and its coupling into the thin-film sensor, using COMSOL Multiphysics. Simulations show that the presence of the photodiode’s insulation layer and transparent electrode strongly affects the coupling efficiency between the waveguide and the sensor.
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Buzzin, A., Asquini, R., Caputo, D., de Cesare, G. (2018). Design of an Evanescent Waveguide Sensor Based on a-Si:H Photodiodes for Lab-on-Chip Applications. In: Leone, A., Forleo, A., Francioso, L., Capone, S., Siciliano, P., Di Natale, C. (eds) Sensors and Microsystems. AISEM 2017. Lecture Notes in Electrical Engineering, vol 457. Springer, Cham. https://doi.org/10.1007/978-3-319-66802-4_19
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DOI: https://doi.org/10.1007/978-3-319-66802-4_19
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