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Gadolinium Scandate

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Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets

Part of the book series: Springer Theses ((Springer Theses))

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Abstract

Obtaining a high κ film of Gd2−xScxO3 by means of HPS from metallic Gd and Sc targets was one of the main objectives of this thesis and it is analyzed in this chapter.

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Authors and Affiliations

  1. Department of Física Aplicada III: Electricidad y Electrónica, Facultad de Ciencias Físicas, The Complutense University of Madrid, Madrid, Spain

    María Ángela Pampillón Arce

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  1. María Ángela Pampillón Arce
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Correspondence to María Ángela Pampillón Arce .

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Pampillón Arce, M.Á. (2017). Gadolinium Scandate. In: Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets. Springer Theses. Springer, Cham. https://doi.org/10.1007/978-3-319-66607-5_6

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