Abstract
Cobalt layers prepared by magnetron sputtering are investigated because of their ferromagnetic properties at room temperature for a potential increase in capacity and speed of current memory media. Deposition of magnetically active material is limited by maximum thickness of the used cobalt disc, which was, in this case, set to 3 mm by the device manufacturer. However, the purchased disc had a thickness of 4.3 mm and therefore it was not possible to perform a deposition. For the purpose of halving, we selected an unconventional technology of Wire electrical discharge machining (WEDM), which does not use mechanical energy for material cutting; due to this technology, the workpiece is not affected by mechanical forces. After successful halving of disc, the morphology of machined surface was analyzed using electron microscopy, and subsequently, a detailed analysis of chemical composition energy-dispersive X-ray detector (EDX) was performed in several locations on the sample. Next, the topography was examined and the profile and surface parameters of quality of machined surface were evaluated including a 3D colour-filtered surface image.
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Acknowledgment
The article was supported by project no. FEKT-S-17-3934, Utilization of novel findings in micro and nanotechnologies for complex electronic circuits and sensor applications.
This research work was supported by the BUT, Faculty of Mechanical Engineering, Brno, Specific research 2016, with the grant “Research of modern production technologies for specific applications”, FSI-S-16-3717 and technical support of Intemac Solutions, Ltd., Kurim.
This research has been financially supported by the Ministry of Education, Youth and Sports of the Czech Republic under the project CEITEC 2020 (LQ1601).
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Mouralova, K., Kovar, J., Zahradnicek, R., Holub, M. (2018). Analysis of Machinability of Pure-Cobalt Disc for Magnetron Deposition Using WEDM. In: Březina, T., Jabłoński, R. (eds) Mechatronics 2017. MECHATRONICS 2017. Advances in Intelligent Systems and Computing, vol 644. Springer, Cham. https://doi.org/10.1007/978-3-319-65960-2_19
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