Abstract
This chapter provides a brief history of semiconductor manufacturing papers in the Winter Simulation Conference (WSC) along with some other key events that led to the development of a community of academicians and semiconductor manufacturing practitioners focused on modeling and analysis of semiconductor manufacturing. Among these influential events were the first Modeling and Analysis of Semiconductor Manufacturing (MASM) conferences. The MASM conference became a conference within the WSC in 2008. We examine this by considering one decade at a time starting with the 1980s.
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References
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Fowler, J.W., Mönch, L. (2017). Modeling and Analysis of Semiconductor Manufacturing. In: Tolk, A., Fowler, J., Shao, G., Yücesan, E. (eds) Advances in Modeling and Simulation. Simulation Foundations, Methods and Applications. Springer, Cham. https://doi.org/10.1007/978-3-319-64182-9_14
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DOI: https://doi.org/10.1007/978-3-319-64182-9_14
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