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International Conference on Intelligent Information Hiding and Multimedia Signal Processing

IIH-MSP 2017: Advances in Intelligent Information Hiding and Multimedia Signal Processing pp 175–182Cite as

A General Auto-Alignment Algorithm for Three-Degree Freedom Stage by Local Inverse Information with Regression Method

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Part of the book series: Smart Innovation, Systems and Technologies ((SIST,volume 81))

Abstract

This paper demonstrated a general algorithm to carry out precision alignment with UVW or XXY and XYθ stages using two cameras without rotation center information. Image processing with template match was implemented to search for fiducial mark under the field of view of a camera as the positioning tool. We established the relationship between cameras and motion stage by calibration procedure with inverse regression method. We finished the substrate’s alignment parallel to the mechanical axis in 2–4 times iterations and applied this algorithm in sixth-generation LCD prober system successfully.

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References

  1. Nian, C.Y., Tarng, Y.S.: An auto-alignment vision system with three-axis motion control mechanism. Int. J. Adv. Manuf. Technol. 26, 1121–1131 (2005)

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  2. Nian, C.Y., Chuang, S.F., Tarng, Y.S.: A new algorithm for a three-axis auto-alignment system using vision inspection. J. Mater. Process. Technol. 171, 319–329 (2006)

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  3. Lee, H.-W., Liu, C.-H., Chiu, Y.-Y., Fang, T.-H.: Design and control of an optical alignment system using a parallel XXY stage and four CCDs for micro pattern alignment. In: Proceedings of the DTIP 2012, pp. 3–17 (2012)

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  4. Matrox Image Library User Manual. Matrox Image

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Author information

Authors and Affiliations

  1. Department of Biomedical Engineering, HunagKang University, No. 1018, Sec. 6, Taiwan Boulevard, Shalu District, Taichung City, 43302, Taiwan (R.O.C.)

    Yu-Min Hung & Yao-Chin Wang

Authors
  1. Yu-Min Hung
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  2. Yao-Chin Wang
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Corresponding author

Correspondence to Yu-Min Hung .

Editor information

Editors and Affiliations

  1. Fujian Provincial Key Lab of Big Data Mining and Applications, Fujian University of Technology , Fuzhou, Fujian, China

    Jeng-Shyang Pan

  2. Swinburne University of Technology, Hawthorn, Victoria, Australia

    Pei-Wei Tsai

  3. Universiti Teknologi Petronas, Teronoh, Malaysia

    Junzo Watada

  4. University of Canberra, Bruce, Aust Capital Terr, Australia

    Lakhmi C. Jain

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Cite this paper

Hung, YM., Wang, YC. (2018). A General Auto-Alignment Algorithm for Three-Degree Freedom Stage by Local Inverse Information with Regression Method. In: Pan, JS., Tsai, PW., Watada, J., Jain, L. (eds) Advances in Intelligent Information Hiding and Multimedia Signal Processing. IIH-MSP 2017. Smart Innovation, Systems and Technologies, vol 81. Springer, Cham. https://doi.org/10.1007/978-3-319-63856-0_22

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  • DOI: https://doi.org/10.1007/978-3-319-63856-0_22

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-63855-3

  • Online ISBN: 978-3-319-63856-0

  • eBook Packages: EngineeringEngineering (R0)

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