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A General Auto-Alignment Algorithm for Three-Degree Freedom Stage by Local Inverse Information with Regression Method

  • Yu-Min HungEmail author
  • Yao-Chin Wang
Conference paper
Part of the Smart Innovation, Systems and Technologies book series (SIST, volume 81)

Abstract

This paper demonstrated a general algorithm to carry out precision alignment with UVW or XXY and XYθ stages using two cameras without rotation center information. Image processing with template match was implemented to search for fiducial mark under the field of view of a camera as the positioning tool. We established the relationship between cameras and motion stage by calibration procedure with inverse regression method. We finished the substrate’s alignment parallel to the mechanical axis in 2–4 times iterations and applied this algorithm in sixth-generation LCD prober system successfully.

Keywords

UVW axis Auto alignment Precision positioning 

References

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Copyright information

© Springer International Publishing AG 2018

Authors and Affiliations

  1. 1.Department of Biomedical EngineeringHunagKang UniversityTaichung CityTaiwan (R.O.C.)

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