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Carbon-related Materials in Recognition of Nobel Lectures by Prof. Akira Suzuki in ICCE pp 261–275Cite as

Electrical Properties of Amorphous Carbon Nitride Thin Films for Pressure Sensor Applications

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Abstract

Amorphous carbon nitride (a-CNx) films are well-known coating materials that provide excellent mechanical and chemical properties such as a low friction coefficient, high wear resistance, high hardness, low chemical inertness, and biocompatibility. Based on initial theoretical results, a-CNx was found to possess impressive properties such as a large bulk modulus of crystalline carbon nitride than that of the diamond. Apart from the mechanical properties, in recent years, unique electrical and optical properties of the a-CNx film have been reported. These properties include deformation under visible-light illumination, tunable bandgap, and photoconductivity. In this chapter, electrical properties of a-CNx films corresponding to the ambient pressure and gas species are presented. By conducting I-V measurements in a vacuum chamber, it was revealed that the electrical resistance value of the a-CNx film prepared via reactive sputtering fluctuates with changes in ambient pressure. The fluctuation range varies with gas species of N2, O2, CO2, and Ar. The gas sensitivity of approximately 3 % is obtained from an exposure area of 0.03 mm2. Based on these results, an economical small pressure sensor fabricated using a-CNx films is proposed.

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Author information

Authors and Affiliations

  1. Department of Materials Science and Engineering, National Defense Academy, 1-10-20 Hashirimizu, Yokosuka, Kanagawa, 239-8686, Japan

    Masami Aono & Naoyuki Tamura

Authors
  1. Masami Aono
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  2. Naoyuki Tamura
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Corresponding author

Correspondence to Masami Aono .

Editor information

Editors and Affiliations

  1. Kanagawa Institute of Industrial Science and Technology, KISTEC, Ebina, Kanagawa, Japan

    Satoru Kaneko

  2. Muroran Institute of Technology, Muroran, Japan

    Paolo Mele

  3. Sagamihara Surface Treatment Laboratory, Sagamihara, Japan

    Tamio Endo

  4. Advanced Coating Technology Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan

    Tetsuo Tsuchiya

  5. Department of Material Chemistry, Kyoto University, Kyoto, Kyoto, Japan

    Katsuhisa Tanaka

  6. Promotion Centre for Global Materials Research (PCGMR), Department of Material Science and Engineering National Cheng Kung University, Tainan, Taiwan

    Masahiro Yoshimura

  7. Department of Mechanical Engineering, University of New Orleans, New Orleans, Louisiana, USA

    David Hui

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Aono, M., Tamura, N. (2017). Electrical Properties of Amorphous Carbon Nitride Thin Films for Pressure Sensor Applications. In: Kaneko, S., et al. Carbon-related Materials in Recognition of Nobel Lectures by Prof. Akira Suzuki in ICCE. Springer, Cham. https://doi.org/10.1007/978-3-319-61651-3_11

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