Abstract
This paper presents two high-resolution CMOS temperature sensors intended for the temperature compensation of MEMS/quartz frequency references. One is based on a Wien bridge RC filter, which outputs a temperature-dependent phase shift when driven by a stable frequency; the other is based on a Wheatstone bridge, which outputs a temperature-dependent current. The bridge outputs are digitized by energy-efficient continuous-time delta-sigma modulators. Two prototypes were fabricated in a standard 0.18 μm CMOS technology. Both dissipate less than 200 μW and achieve sub-mK resolution, as well as sub-0.2pJ·K2 resolution FoMs, which corresponds to state-of-the-art energy efficiency.
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Acknowledgments
The authors would like to thank Yanquan Luo and Saleh Heidary Shalmany for their contributions to the Wien bridge sensor design and Hui Jiang for his work on the Wheatstone bridge sensor. The authors would also like to thank Burak Gönen, Vincent van Hoek, and Said Hussaini for proofreading and suggestions.
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Pan, S., Makinwa, K.A.A. (2018). Energy-Efficient High-Resolution Resistor-Based Temperature Sensors. In: Harpe, P., Makinwa, K., Baschirotto, A. (eds) Hybrid ADCs, Smart Sensors for the IoT, and Sub-1V & Advanced Node Analog Circuit Design. Springer, Cham. https://doi.org/10.1007/978-3-319-61285-0_10
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DOI: https://doi.org/10.1007/978-3-319-61285-0_10
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