System Design

Abstract

This section presents a behavioral model for MEMS magnetometers at a system level, which is implemented using Simulink^Ⓡ by Mathworks^Ⓡ, a block diagram environment for multidomain dynamic simulations. One of the main reasons for MEMS rapid growth is the possibility to combine actuating and sensing mechanical elements together with signal conditioning electronics in a system which is getting more and more complex. Simulations are fundamental to ensure the proper functioning and to comply with design constraints. Moreover, from an industrial point of view, a design flow aided by system models helps to reduce time-to-market and prototyping costs. Magnetic field sensing system modelling allows to investigate the working principle and predict resonator’s behavior, to evaluate effects of process spreads and changes of mechanical structure, to study driving and readout mechanisms, and to evaluate system performance before implementation [1].