Abstract
The aim of this chapter is to review some main theoretical concepts related to MEMS that are used in the course of this book. After a brief introduction to dynamics of MEMS and to parallel-plates capacitive readout—a very popular technique for micromachined devices—and the related pull-in problem, this chapter deals with Lorentz force transduction principle applied to a micromachined structure. Magnetic field sensors are devices to measure the strength and/or direction of local magnetic field and they represent a fundamental block to integrate compass-based applications in mobile devices. Mechanical thermal noise, which sets the mechanical resolution of the device, is then introduced.
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Notes
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This unusual symbol is used to avoid misleading this quantity with current, denoted in all the manuscript with the symbol I.
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Buffa, C. (2018). Lorentz Force Magnetometers. In: MEMS Lorentz Force Magnetometers. Springer, Cham. https://doi.org/10.1007/978-3-319-59412-5_3
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DOI: https://doi.org/10.1007/978-3-319-59412-5_3
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