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From Prototype to Product

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MEMS Lorentz Force Magnetometers
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Abstract

During the course of this book the full development of a MEMS magnetic field sensor prototype has been shown, providing some guidelines and highlighting critical points and potential pitfalls, as well as how to forecast or mitigate them. The feasibility of such a system based on multi-chip approach has been experimentally proven and the main steps, which represent the core of the design activity for a new product development, have been reported. Beside these ones, in an industry-related environment there are other standard development steps, including, for example, pads design, programming interface, biasing blocks, etc., in order to guarantee typical products specifications, such as ESD requirements, RFI immunity, etc., and to have high yield in production. All major steps needed will be mentioned in this chapter but they are not discussed in detail; however, some references are provided.

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References

  1. M. Li, S. Sonmezoglu, D.A. Horsley, J. Microelectromech. Syst. 24(2), 333 (2015). doi: 10.1109/JMEMS.2014.2330055

    Article  Google Scholar 

  2. M. Li, D.A. Horsley, J. Microelectromech. Syst. 23(6), 1477 (2014). doi: 10.1109/JMEMS.2014.2316452

    Article  Google Scholar 

  3. G. Langfelder, C. Buffa, P. Minotti, A. Longoni, A. Tocchio, S. Zerbini, in 2014 44th European Solid State Device Research Conference (ESSDERC) (2014), pp. 62–65. doi: 10.1109/ESSDERC.2014.6948758

  4. P.R. Gray, P.J. Hurst, S.H. Lewis, R.G. Meyer, Analysis and Design of Analog Integrated Circuits, 5th edn. (Wiley, New York, 2009)

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  5. S. Pavan, R. Schreier, G.C. Temes, Understanding Delta-sigma Data Converters, 2nd edn. (Wiley-IEEE Press, New York, 2017)

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  6. V.A. Vashchenko, A. Shibkov, ESD Design for Analog Circuits (Springer, New York, 2010)

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Buffa, C. (2018). From Prototype to Product. In: MEMS Lorentz Force Magnetometers. Springer, Cham. https://doi.org/10.1007/978-3-319-59412-5_10

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  • DOI: https://doi.org/10.1007/978-3-319-59412-5_10

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-319-59411-8

  • Online ISBN: 978-3-319-59412-5

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