Abstract
Microelectromechanical systems (MEMS) originally referred to microscale systems made of both electrical and mechanical moving parts, being able to perform something interesting or useful. They are μ-sized 3D structures, realized with lithographic processes, which can interact with external world and they are typically integrated with electronic circuits. The presence of mechanical moving parts let them be sensors and actuators of our environment; they are reliable and cost effective.
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Buffa, C. (2018). Introduction. In: MEMS Lorentz Force Magnetometers. Springer, Cham. https://doi.org/10.1007/978-3-319-59412-5_1
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DOI: https://doi.org/10.1007/978-3-319-59412-5_1
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