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Field Emission Electronics pp 43–114Cite as

Experimental Equipment and Technique

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Part of the book series: Springer Series in Advanced Microelectronics ((MICROELECTR.,volume 60))

Abstract

This chapter presents the field emission electron microscope, its technical characteristics and various modern construction of microscopes. A particular attention is paid to analyzing full energies of the electrons and universal constructions of field electron microscopes that are the main branch of development of microscopy and spectroscopy. The most popular practical techniques of manufacture of tip field emitters from different materials.

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Authors and Affiliations

  1. Saint Petersburg State University, St. Petersburg, Russia

    Nikolay Egorov

  2. MIPT, Dolgoprudny, Moscow region, Russia

    Evgeny Sheshin

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  1. Nikolay Egorov
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  2. Evgeny Sheshin
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Correspondence to Nikolay Egorov .

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Egorov, N., Sheshin, E. (2017). Experimental Equipment and Technique. In: Field Emission Electronics. Springer Series in Advanced Microelectronics, vol 60. Springer, Cham. https://doi.org/10.1007/978-3-319-56561-3_2

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