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Experimental Equipment and Technique

  • Nikolay EgorovEmail author
  • Evgeny Sheshin
Chapter
Part of the Springer Series in Advanced Microelectronics book series (MICROELECTR., volume 60)

Abstract

This chapter presents the field emission electron microscope, its technical characteristics and various modern construction of microscopes. A particular attention is paid to analyzing full energies of the electrons and universal constructions of field electron microscopes that are the main branch of development of microscopy and spectroscopy. The most popular practical techniques of manufacture of tip field emitters from different materials.

Keywords

Field Emission Cone Angle Adsorbed Atom Electron Work Function Gear Wheel 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer International Publishing AG 2017

Authors and Affiliations

  1. 1.Saint Petersburg State UniversitySt. PetersburgRussia
  2. 2.MIPTDolgoprudny, Moscow regionRussia

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