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Piezoresistive Effect of p-Type Single Crystalline 3C-SiC pp 101–108Cite as

The Piezoresistive Effect in p-Type Nanocrystalline SiC

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Abstract

Different from single crystalline SiC, nanocrystalline SiC (nc-SiC), with its grain size in sub-micron scale, can be grown on various substrates (e.g. silicon, silicon dioxide, silicon nitride) and therefore, it is a good candidate for MEMS transducers (Komura, Jpn J Appl Phys, 46(1):45–50, 2007, [1]; Somogyi, Nanoscale, 4:7720–7726, 2012, [3]; Eickhoff, J Appl Phys, 96:2872–2879, 2004, [2]).

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Authors and Affiliations

  1. Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane, QLD, Australia

    Hoang-Phuong Phan

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Phan, HP. (2017). The Piezoresistive Effect in p-Type Nanocrystalline SiC. In: Piezoresistive Effect of p-Type Single Crystalline 3C-SiC. Springer Theses. Springer, Cham. https://doi.org/10.1007/978-3-319-55544-7_5

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