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Complex Reaction Network in Silane Plasma Chemistry

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Part of the book series: Springer Proceedings in Complexity ((SPCOM))

Abstract

Chemical reactions become significantly complex when plasma is introduced in a reaction space . We study silane plasma chemistry, and centrality indices derived from the reaction network indicate several points of information about species in reactions as well as macroscopic topology in the entire network graph. Stable species, unstable species and electrons play different roles as triggers or products of reactions, and this analytical method provides several points that cannot be revealed by rate-equation calculations, which have been popular in chemical analysis.

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Acknowledgements

One of the authors (OS) thanks Prof. M. J. Kushner at University of Michigan, Prof. T. Murakami at Seikei University, Prof. S. Nunomura at National Institute of Advanced Industrial Science and Technology, and Prof. T. Akiyama at The University of Shiga Prefecture for their useful comments on this study. This study was supported by Grant-in-Aid for Scientific Research from the Japanese Ministry of Education, Culture, Sports, Science and Technology, Japan.

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Correspondence to Osamu Sakai .

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Mizui, Y., Nobuto, K., Miyagi, S., Sakai, O. (2017). Complex Reaction Network in Silane Plasma Chemistry. In: Gonçalves, B., Menezes, R., Sinatra, R., Zlatic, V. (eds) Complex Networks VIII. CompleNet 2017. Springer Proceedings in Complexity. Springer, Cham. https://doi.org/10.1007/978-3-319-54241-6_11

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