Abstract
There are a lot of developments in the micro manufacturing methods for the production of the three-dimensional miniaturized products made up of different advanced materials. Ultrasonic micro machining is an essential technique for the fabrication of micro parts on the hard, brittle and non-conductive materials like glass, ceramics and silicon with high aspect ratio. Ultrasonic micro machining is the mechanical type non conventional micro machining process. Material removal mechanism of USMM is similar to macro ultrasonic machining process. Adequate surface finish with stiff tolerances and dimensions can be achieved by ultrasonic micro machining (USMM) on hard and brittle materials. During the last decades, a number of researchers have explored experimentally and theoretically this ultrasonic micro machining (USMM) process technique with different materials. Recent development on ultrasonic micro machining (USMM) process has been highlighted and discussed in details with different types of ultrasonic micro machining (USMM) set up and material removal mechanism. Design and developments of micro-tools for USMM process have also been discussed. Influences of different process parameters on various responses of USMM have been discussed here.
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References
S.G. Amin, M.H.M. Ahmed, H.A. Youssef, “Computer-aided design of acoustic horns for ultrasonic machining using finite-element analysis”, Journal of Materials Processing Technology 55 (1995) 254–260.
Thoe, T., D. Aspinwall, Wise M. Review on ultrasonic machining. International Journal of Machine Tools and Manufacture, 1998. 38(4): p. 239–255.
Egashira K.; Masuzawa T.; Fujino M. and Sun X. Q. “Application of USM to micromachining by on-the-machine tool fabrication,” International Journal of Electrical Machining, no. 2, pp. 31–36, 1997.
Egashira K. and Masuzawa T. “Microultrasonic machining by the application of workpiece vibration,” CIRP Annals—Manufacturing Technology, vol. 48, no. 1, pp. 131–134, 1999.
Kremer D. Saleh S. M. Ghabrial S. R. and Moisan A. “The State of the Art of Ultrasonic Machining,” CIRP Annals—Manufacturing Technology, vol. 30, no. 1, pp. 107–110, 1981.
Barash M.M. and Watanapongse D. (1970), “On the effect of ambient pressure on the rate of material removal in ultrasonic machining”, International Journal of Mechanical Sciences, Vol. 12, pp. 775–779.
Li Z.C., Jiaoa Y., Deinesa T.W., Pei Z.J.(2005), “Rotary ultrasonic machining of ceramics matrix composites: feasibility study and designed experiments”, International Journal of Machine Tools and Manufacture, Vol. 45, No. 12–13, pp. 1402–1411.
Jianxin, D. and Taichiu, L (2000), “Surface integrity in electro-discharge machining, ultrasonic machining and diamond saw cutting of ceramic composites”, Ceramic International, Vol. 26, No. 8, pp. 825–830.
Balamuth L.A. (1966), “Ultrasonic assistance to conventional metal removal”, Ultrasonics, Vol. 4, pp. 125–130.
Babitsky V.I., Mitrofanov A.V., Silverschmidt V.V. (2004), “Ultrasonically assisted turning of aviation materials: simulations and experimental study”, Ultrasonics, Vol. 42, pp. 81–86.
X. Q. Sun, T. Masuzawa, and M. Fujino, “Micro ultrasonic machining and self-aligned multilayer machining/assembly technologies for 3D micromachines,” in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS ’96), pp. 312–317, 1996.
Ghahramani B. and Z. Y. Wang Z. Y., “Precision ultrasonic machining process: a case study of stress analysis of ceramic (Al2O3),” International Journal of Machine Tools and Manufacture, vol. 41, no. 8, pp. 1189–1208, 2001.
Masuzawa T. and Tönshoff H. K. “Three-dimensional micromachining by machine tools,” CIRP Annals —Manufacturing Technology, vol. 46, no. 2, pp. 621–628, 1997.
Sun, X.Q., Masuzawa, T, Fujino, M., Micro ultrasonic machining and self-aligned multilayer ma-chining/assembly technologies for 3D micromachines, Proc. IEEE, 1996, pp. 312–317.
Yu, Z.Y., Rajurkar, K.P., and Tandon, A. Study of 3D Micro-Ultrasonic Machining. Journal of Manufacturing Science and Engineering, 2004, 126(4), 727–732.
Sarwade, A., Sundaram, M. M., & Rajurkar, K. P. (2010). Investigation of micro hole drilling in bovine rib using micro rotary ultrasonic machining. In 16th International Symposium on Electromachining, ISEM 2010. (pp. 411–416). Shanghai Jiaotong University Press.
Sarwade, A., Sundaram, M. M., & Rajurkar, K. P. (2010). Micro rotary ultrasonic machining: Effect of machining parameters on material removal rate. In Transactions of the North American Manufacturing Research Institution of SME. (Vol. 38, pp. 113–120).
Shimada, S., et al., Brittle-Ductile Transition Phenomena in Microindentation and Micromachining. CIRP Annals—Manufacturing Technology, 1995. 44(1): p. 523–526.
Zarepour, H., Yeo. S.H. (2012) Predictive modeling of material removal modes in micro ultrasonic machining. International Journal of Machine Tools and Manufacture, vol. 62, pp. 13–23.
Yu, Z., X. Hu, K.P. Rajurkar. Influence of Debris Accumulation on Material Removal and Surface Roughness in Micro Ultrasonic Machining of Silicon. CIRP Annals—Manufacturing Technology, 2006. 55(1): p. 201–204.
Lia G.; Yu Z.; Song J.; Li C., Li J. and Wataru Natsu W., “Material Removal Modes of Quartz Crystals by Micro USM”, Procedia CIRP 42 (2016) 842–846.
H. Zarepour & S. H. Yeo & P. C. Tan, E. Aligiri, “A new approach for force measurement and workpiece clamping in micro-ultrasonic machining”, Int J Adv Manuf Technol (2011) 53:517–522.
K. P. Rajurkar, and W. M. Wang, “Nontraditional Machining,” CRC Handbook of Mechanical Engineering-Ch.13, 1997, pp. 29–34.
W. H. Fan, C. L. Chao, W. C. Chou, T. T. Chen, and C. W. Chao, “Study on the surface integrity of micro-ultrasonic machined glass-ceramic material,” Key Engineering Materials, Vol.407–408, pp. 731–734, 2009.
M. Komaraiah and P. Narasimha Reddy, “A study on the influence of workpiece properties in ultrasonic machining,” Int. J. of Machine Tools and Manufacture, Vol.33, No.3, pp. 495–505, 1993.
Soundararajan V. and Radhakrishnan, V., “An experimental investigation on the basic mechanisms involved in ultrasonic machining,” Int. J. of Machine Tool Design and Research, Vol.26, No.3, pp. 307–321, 1986.
Y. Ichida, R. Sato, Y. Morimoto, and K. Kobayashi, “Material removal mechanisms in non-contact ultrasonic abrasive machining,” Wear, Vol.258, No.1–4, pp. 107–114, 2005.
D. Kremer, S. M. Saleh, S. R. Ghabrial, and A. Moisan, “The state of the art of ultrasonic machining,” CIRP Annals—Manufacturing Technology, Vol.30, No.1, pp. 107–110, 1981.
A.G. Evans, Fracture mechanics determinations, in: Fracture Mechanics of Ceramics, vol. 1, Plenum, New York, 1974.
D. Charkaborty, J. Mukeryi, Indentation induced cracks in hot pressed Si3N4, Indian J. Technol. 20 (1982) 361–365.
A.G. Evans, D.B. Marshall, in: D.A. Rigney (Ed.), Fundamentals of Friction and Wear of Materials, ASME, 1981, pp. 439–440.
A.G. Evans, T.R. Wilshaw, Quasi-static solid particle damage in brittle solids—I. Observations, analysis and implications, Acta Metallurgica, vol. 24, Pergamon Press, 1976, pp. 939–956, printed in Great Britain.
M. Komaraiah, P.N. Reddy, A study on the influence of workpiece properties in ultrasonic machining, Int. J. Mach. Tools Manuf. 33 (3) (1993) 495–505.
Shaw M.C. (1956), “Ultrasonic grinding”, Annals of CIRP, Vol. 5, pp. 25–53.
Miller G.E. (1957), “Special theory of ultrasonic machining”, Journal of Applied Physics, Vol. 28, No. 2, pp. 149–156.
Rozenberg, L.D.; Kazantsev, V.F.; Makarov, L.O. and Yakhimovich D. F. (1964), “Ultrasonic Cutting”, Consultant Bureau, New York, pp. 97–102.
Cook N.H. (1966), “Manufacturing analysis”, Addison-Wesley, New York, pp. 133–148.
Kainth G.S.; Nandy A. and Singh K. (1979), “On the mechanisms of material removal in ultrasonic machining” International Journal of Machine Tool Design and Research, Vol. 19, pp. 33–41.
Nair E.V. and Ghosh A. (1985), “A fundamental approach to the study of mechanics of ultrasonic machining”, Int. Journal of Prod. Research, Vol. 23, pp. 731–753.
Rajurkar K.P.; Wang Z.Y. and Kuppattan A. (1999), “Micro removal of ceramic material (Al2O3) in the precision ultrasonic machining”, Precision Engineering, Vol. 23, No.2, pp 73–78.
Lee T.C. and Chan C.W. (1997), “Mechanism of the ultrasonic machining of ceramic composites”, Journal of Materials Processing Technology, Vol. 71, pp. 195–201.
Wiercigroch M., Neilson R.D., Player M.A. (1999), “Material removal rate prediction for ultrasonic drilling of hard materials using an impact oscillator approach”, Physics Letters, Vol. 259, pp. 91–96.
Nath C.; Lim G. C.; and Zheng H.Y. (2012) “Influence of the material removal mechanisms on hole integrity in ultrasonic machining of structural ceramics”, Ultrasonics, Vol.52, pp. 605–613.
Ichida, Y.; Sato, R.; Y. Morimoto, Y. and Kobayashi, K. (2005) “Material removal mechanisms in non-contact ultrasonic abrasive machining”, Wear, Vol. 258, pp. 107–114.
Benedict G.F. (1987), Nontraditional Manufacturing Processes, new York, Marcel Decker Inc. pp. 67–83.
Kennedy, D.K. and Grieve, R.J. (1975), “Ultrasonic machining—A review”, The Production Engineering, Vol. 54, pp. 481.
Lee B.J., Kim K. E. (2009), “Characteristics of micro-hole machining of Al2O3 ceramics by ultrasonic longitudinal vibration”, Journal of ceramics processing research, Vol. 10, No. 4, pp. 482–490.
Yu Z. Y.; Rajurkar K.P.; and Tandon A. (2004), “Study of 3D micro-ultrasonic machining,” Journal of Manufacturing Science and Engineering, Transactions of the ASME, vol. 126, no. 4, pp. 727–732.
Hocheng H.; Kuo K.L. and Lin J.T. (1999), Machineability of zirconia ceramics in ultrasonic drilling. Mater. Manuf. Process. vol. 14, no. 5, pp. 713–724.
Egashira, K.; Taniguchi, T.; Tsuchiya, H. and Miyazaki, M. “Micro ultrasonic machining using multi tools,” in Proceedings of the 7th International Conference on Progress Machining Technology (ICPMT ’04), pp. 297–301, December 2004.
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Das, S., Doloi, B., Bhattacharyya, B. (2017). Recent Advancement on Ultrasonic Micro Machining (USMM) Process. In: Kibria, G., Bhattacharyya, B., Davim, J. (eds) Non-traditional Micromachining Processes. Materials Forming, Machining and Tribology. Springer, Cham. https://doi.org/10.1007/978-3-319-52009-4_2
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DOI: https://doi.org/10.1007/978-3-319-52009-4_2
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