Skip to main content
SpringerLink
Log in
Book cover

Transport of Energetic Electrons in Solids pp 109–119Cite as

Applications

  • Chapter
  • First Online:

  • 846 Accesses

Part of the book series: Springer Tracts in Modern Physics ((STMP,volume 999))

Abstract

In this chapter we will discuss some important applications of the Monte Carlo method in nanometrology . We will describe, in particular, (1) the line-scan calculations of resist materials with given geometrical cross-sections deposited on silicon substrates; and (2) the energy selective SEM for image contrast in silicon p-n junctions.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   99.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

References

  1. A. Koschik, M. Ciappa, S. Holzer, M. Dapor, W. Fichtner, Proc. SPIE 7729, 77290X-1 (2010)

    Google Scholar 

  2. C.G. Frase, D. Gnieser, H. Bosse, J. Phys. D: Appl. Phys. 42, 183001 (2009)

    Article  ADS  Google Scholar 

  3. J.S. Villarrubia, A.E. Vladár, B.D. Bunday et al., Proc. SPIE 5375, 199 (2004)

    Article  ADS  Google Scholar 

  4. J.S. Villarrubia, A.E. Vladár, M.T. Postek, Surf. Interface Anal. 37, 951 (2005)

    Article  Google Scholar 

  5. J.S. Villarrubia, N. Ritchie, J.R. Lowney, Proc. SPIE 6518, 65180K (2007)

    Article  ADS  Google Scholar 

  6. M. Ciappa, A. Koschik, M. Dapor, W. Fichtner, Microelectron. Reliab. 50, 1407 (2010)

    Article  Google Scholar 

  7. J.P. Ganachaud, A. Mokrani, Surf. Sci. 334, 329 (1995)

    Article  ADS  Google Scholar 

  8. M. Dapor, M. Ciappa, W. Fichtner, J. Micro/Nanolith, MEMS MOEMS 9, 023001 (2010)

    Google Scholar 

  9. M. Dapor, Nucl. Instrum. Methods Phys. Res. B 269, 1668 (2011)

    Article  ADS  Google Scholar 

  10. F. Salvat, J.M. Fernández-Varea, E. Acosta, J. Sempau, PENELOPE: A Code System for Monte Carlo Simulation of Electron and Photon Transport (Nuclear Energy Agency - Organisation for Economic Cooperation and Development Publishing, 2001)

    Google Scholar 

  11. J. Baró, J. Sempau, J.M. Fernández-Varea, F. Salvat, Nucl. Instrum. Methods Phys. Res. B 84, 465 (1994)

    Article  ADS  Google Scholar 

  12. J.M. Fernández-Varea J. Baró, J. Sempau, F. Salvat, Nucl. Instrum. Methods Phys. Res. B 100, 31 (1995)

    Google Scholar 

  13. M. Dapor, B.J. Inkson, C. Rodenburg, J.M. Rodenburg, Europhys. Lett. 82, 30006 (2008)

    Article  ADS  Google Scholar 

  14. A. Howie, Microsc. Microanal. 6, 291 (2000)

    ADS  Google Scholar 

  15. A. Shih, J. Yater, P. Pehrrson, J. Buttler, C. Hor, R. Abrams, J. Appl. Phys. 82, 1860 (1997)

    Article  ADS  Google Scholar 

  16. F. Iwase, Y. Nakamura, S. Furuya, Appl. Phys. Lett. 64, 1404 (1994)

    Article  ADS  Google Scholar 

  17. F. Iwase, Y. Nakamura, Appl. Phys. Lett. 71, 2142 (1997)

    Article  ADS  Google Scholar 

  18. D.D. Perovic, M.R. Castell, A. Howie, C. Lavoie, T. Tiedje, J.S.W. Cole, Ultramicroscopy 58, 104 (1995)

    Article  Google Scholar 

  19. D. Venables, H. Jain, D.C. Collins, J. Vac. Sci. Technol. B 16, 362 (1998)

    Article  Google Scholar 

  20. S.L. Elliott, R.F. Broom, C.J. Humphreys, J. Appl. Phys. 91, 9116 (2002)

    Article  ADS  Google Scholar 

  21. T.H.P. Chang, W.C. Nixon, Solid-State Electron. 10, 701 (1967)

    Article  ADS  Google Scholar 

  22. N. Ashcroft, N.D. Mermin, Solid State Physics, (W.B Saunders, 1976)

    Google Scholar 

  23. P. Kazemian, Progress towards Quantitive Dopant Profiling with the Scanning Electron Microscope (Doctorate Dissertation, University of Cambridge, 2006)

    Google Scholar 

  24. C. Rodenburg, M.A.E. Jepson, E.G.T. Bosch, M. Dapor, Ultramicroscopy 110, 1185 (2010)

    Article  Google Scholar 

  25. A.K.W. Chee, C. Rodenburg, C.J. Humphreys, Mater. Res. Soc. Symp. Proc. 1026, C04–02 (2008)

    Google Scholar 

  26. T. Koshikawa, R. Shimizu, J. Phys. D. Appl. Phys. 7, 1303 (1974)

    Article  ADS  Google Scholar 

  27. H.J. Fitting, E. Schreiber, JCh. Kuhr, A. von Czarnowski, J. Electron. Spectrosc. Relat. Phenom. 119, 35 (2001)

    Article  Google Scholar 

  28. L. Anchordoqui, T. Paul, S. Reucroft, J. Swain, Int. J. Modern Phys. A 18, 2229 (2003)

    Article  ADS  Google Scholar 

  29. T. Kanai, Y. Furusawa, K. Fukutsu, H. Itsukaichi, K. Eguchi-Kasai, H. Ohara, Radiat. Res. 147, 78 (1997)

    Article  Google Scholar 

  30. M. Krämer, O. Jäkel, T. Haberer, G. Kraft, D. Schardt, U. Weber, Phys. Med. Biol. 45, 3299 (2000)

    Article  Google Scholar 

  31. I. Turesson, K.-A. Johansson, S. Mattsson, Acta Oncologica 42, 107 (2003)

    Article  Google Scholar 

  32. A. Brahme, Int. J. Radiat. Oncol. Biol. Phys. 58, 603 (2004)

    Google Scholar 

  33. D. Schulz-Ertner, H. Tsujii, J. Clin. Oncol. 25, 953 (2007)

    Article  Google Scholar 

  34. T. Elsässer, W.K. Weyrather, T. Friedrich, M. Durante, G. Iancu, M. Krämer, G. Kragl, S. Brons, M. Winter, K.-J. Weber, M. Scholz, Int. J. Radiat. Oncol. Biol. Phys. 78, 1177 (2010)

    Google Scholar 

  35. M. Durante, J. Loeffler, Nat. Rev. Clin. Oncol. 7, 37 (2010)

    Article  Google Scholar 

  36. J.S. Loeffler, M. Durante, Nat. Rev. Clin. Oncol. 10, 411 (2013)

    Article  Google Scholar 

  37. E. Scifoni, Modern Phys. Lett. A 30, 1540019 (2015)

    Article  ADS  Google Scholar 

  38. R. Baskar, K.A. Lee, R. Yeo, K.-W. Yeoh, Int. J. Med. Sci. 9, 193 (2012)

    Article  Google Scholar 

  39. B. Boudaïffa, P. Cloutier, D. Hunting, M.A. Huels, L. Sanche, Science 287, 1658 (2000)

    Article  ADS  Google Scholar 

  40. X. Pan, P. Cloutier, D. Hunting, L. Sanche, Phys. Rev. Lett. 90, 20812 (2003)

    Google Scholar 

  41. R. Garcia-Molina, I. Abril, S. Heredia-Avalos, I. Kyriakou, D. Emfietzoglou, Phys. Med. Biol. 56, 6475 (2011)

    Article  Google Scholar 

  42. R. Garcia-Molina, I. Abril, P. de Vera, I. Kyriakou, D. Emfietzoglou, Proton beam irradiation of liquid water: a combined molecular dynamics and Monte Carlo simulation study of the Bragg peak profile, in Fast Ion-Atom and Ion-Molecule Collisions, ed. by D. Belkic, Chap. 8, pp. 271–304 (World Scientific Publishing Company, Singapore, 2012)

    Google Scholar 

  43. P. de Vera, R. Garcia-Molina, I. Abril, A.V. Solov’yov, Phys. Rev. Lett. 110, 148104 (2013)

    Google Scholar 

  44. M. Dapor, I. Abril, P. de Vera, R. Garcia-Molina, Eur. Phys. J. D 69, 165 (2015)

    Article  ADS  Google Scholar 

  45. M. Dapor, I. Abril, P. de Vera, R. Garcia-Molina, Int. J. Chem. Mol. Nucl. Mater. Metall. Eng. 10, 965 (2016)

    Google Scholar 

  46. C. Udalagama, A.A. Bettiol, F. Watt, Phys. Rev. B 80, 224107 (2009)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. European Centre for Theoretical Studies in Nuclear Physics and Related Areas, Trento, Italy

    Maurizio Dapor

Authors
  1. Maurizio Dapor
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Maurizio Dapor .

Rights and permissions

Reprints and permissions

Copyright information

© 2017 Springer International Publishing AG

About this chapter

Cite this chapter

Dapor, M. (2017). Applications. In: Transport of Energetic Electrons in Solids. Springer Tracts in Modern Physics, vol 999. Springer, Cham. https://doi.org/10.1007/978-3-319-47492-2_9

Download citation

Publish with us

Policies and ethics

Search

Navigation