Abstract
The backscattered electron (BSE) emission coefficient is defined as the fraction of electrons of the primary beam emerging from the surface of an electron-irradiated target. Secondary electrons , generated in the solid by a cascade process of extraction of the atomic electrons, are not included in the definition of the backscattering coefficient . The energy cut-off is typically 50 eV. In other words, in a typical SEM experiment aimed at measuring the fraction of backscattered electrons , investigators consider as backscattered all the electrons emerging from the surface of the target with energies higher than the cut-off energy (50 eV), while all the electrons emerging with energies lower than this conventional cut-off are considered as secondary.
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Dapor, M. (2017). Backscattering Coefficient. In: Transport of Energetic Electrons in Solids. Springer Tracts in Modern Physics, vol 999. Springer, Cham. https://doi.org/10.1007/978-3-319-47492-2_6
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DOI: https://doi.org/10.1007/978-3-319-47492-2_6
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