Abstract
Monte Carlo is one of the most powerful theoretical methods for evaluating the physical quantities related to the interaction of electrons with a solid target. A Monte Carlo simulation can be considered as an idealized experiment. The simulation does not investigate the fundamental principles of the interaction. It is necessary to have a good knowledge of them – in particular of the energy loss and angular deflection phenomena – to produce a good simulation. All the cross-sections and mean free paths have to be previously accurately calculated: they are then used in the Monte Carlo code in order to obtain the macroscopic characteristics of the interaction processes by simulating a large number of single particle trajectories and then averaging them. Due to the recent evolution in computer calculation capability, we are now able to obtain statistically significant results in very short calculation times.
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References
T. Kobayashi, H. Yoshino, S. Horiguchi, M. Suzuki, Y. Sakakibara, Appl. Phys. Lett. 39, 512 (1981)
G. Messina, A. Paoletti, S. Santangelo, A. Tucciarone, La Rivista del Nuovo Cimento 15, 1 (1992)
J.F. Perkins, Phys. Rev. 126, 1781 (1962)
M. Dapor, Phys. Rev. B 46, 618 (1992)
R. Shimizu, D. Ze-Jun, Rep. Prog. Phys. 55, 487 (1992)
R.H. Ritchie, Phys. Rev. 106, 874 (1957)
H. Fröhlich, Adv. Phys. 3, 325 (1954)
J.P. Ganachaud, A. Mokrani, Surf. Sci. 334, 329 (1995)
H. Bichsel, Nucl. Instrum. Methods Phys. Res. B 52, 136 (1990)
J. Llacer, E.L. Garwin, J. Appl. Phys. 40, 2766 (1969)
M. Dapor, Nucl. Instrum. Methods Phys. Res. B 267, 3055 (2009)
P. Kazemian, Progress towards Quantitive Dopant Profiling with the Scanning Electron Microscope (Doctorate Dissertation, University of Cambridge, 2006)
Y.F. Chen, C.M. Kwei, Surf. Sci. 364, 131 (1996)
Y.C. Li, Y.H. Tu, C.M. Kwei, C.J. Tung, Surf. Sci. 589, 67 (2005)
A. Jablonski, C.J. Powell, Surf. Sci. 551, 106 (2004)
M. Dapor, L. Calliari, S. Fanchenko, Surf. Interface Anal. 44, 1110 (2012)
Z.-J. Ding, R. Shimizu, Phys. Rev. B 61, 14128 (2000)
M. Novák, Surf. Sci. 602, 1458 (2008)
M. Novák, J. Phys. D Appl. Phys. 42, 225306 (2009)
H. Jin, H. Yoshikawa, H. Iwai, S. Tanuma, S. Tougaard, e-J. Surf. Sci. Nanotech. 7, 199 (2009)
H. Jin, H. Shinotsuka, H. Yoshikawa, H. Iwai, S. Tanuma, S. Tougaard, J. Appl. Phys. 107, 083709 (2010)
I. Kyriakou, D. Emfietzoglou, R. Garcia-Molina, I. Abril, K. Kostarelos, J. Appl. Phys. 110, 054304 (2011)
B. Da, S.F. Mao, Y. Sun, Z.J. Ding, e-J. Surf. Sci. Nanotechnol. 10, 441 (2012)
B. Da, Y. Sun, S.F. Mao, Z.M. Zhang, H. Jin, H. Yoshikawa, S. Tanuma, Z.J. Ding, J. Appl. Phys. 113, 214303 (2013)
F. Salvat-Pujol, Secondary-electron emission from solids: Coincidence experiments and dielectric formalism (Doctorate Dissertation, Technischen Universität Wien, 2012)
F. Salvat-Pujol, W.S.M. Werner, Surf. Interface Anal. 45, 873 (2013)
T. Tang, Z.M. Zhang, B. Da, J.B. Gong, K. Goto, Z.J. Ding, Physica B 423, 64 (2013)
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Dapor, M. (2017). Monte Carlo Strategies. In: Transport of Energetic Electrons in Solids. Springer Tracts in Modern Physics, vol 999. Springer, Cham. https://doi.org/10.1007/978-3-319-47492-2_5
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DOI: https://doi.org/10.1007/978-3-319-47492-2_5
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