Abstract
Independent simulations of mechanical and electrical parts are no longer sufficient. It is necessary to incorporate parameters of both type of elements in a multidomain process in which the joint action is checked and co-optimization is performed. Such an approach allows to reduce cost and shorten time to market. This article presents how complex a multidirectional simulation process is nowadays. Moreover it present methodology and tools applicable for MEMS product development together with results of numerical simulations and optimization.
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References
Janczyk, G., Bieniek, T., Szynka, J., Grabiec, P.: Reliability aspects of 3D-Oriented heterogeneous device related to stress sensitivity of MOS transistors. In: Proceedings of the IEEE international 3D systems conference CD 2009, pp. 1–6 (2009)
Janczyk, G., Bieniek, T., Grabiec, P., Szynka, J.: Thermo-mechanical aspects of reliability for vertically integrated heterogeneous systems. In: Proceedings of 16th international conference mixed design of integrated circuits and systems (2009)
Bieniek, T., Janczyk, G., Janus, P., Ekwińska, M., Szmigiel, D., Domański, K., Grabiec, P., Dumania P.: Efficient scenarios, methodology and tools for MEMS/NEMS product development. In: Proceedings of the 10th international conference on multi-material micro manufacture (4 M 2013), pp. 284–287 (2013)
Ortloff, D., Schmidt, T., Hahn, K., Bieniek, T., Janczyk, G., & Brück, R.: MEMS product engineering. In MEMS Product Engineering, pp. 53–83. Springer, Vienna (2014)
Bieniek, T., Janczyk, G., Grabiec, P., Szynka, J., Kalicinski, S., Janus, P., Domanski, K., Sierakowski, A., Ekwinska, M., Szmigiel, D., Tomaszewski, D., Holzer, G., Schropfer G.: Customer-oriented product engineering of micro and nano devices. In: Proceedings of the 17th international conference on mixed design of integrated circuits and systems, pp. 81–84 (2010)
Coventor® CoventorWare User Guide, more info available at www.coventor.com (2015)
Coventor® MEMS + User Guide, more info available at www.coventor.com (2015)
Bieniek, T., Janczyk, G., Ekwińska, M., Budzyński, T., Głuszko, G., Grabiec, P., KociubińskiA.: Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example. IEEE, 978-1-4799-8472-5/14 (2014)
Scheeper, P.R., Nordstrand, B., Gullov, J.O., Bin, L., Clausen, T., Midjord, L., Storgaard- Larsen, T.: A new measurement microphone based on MEMS technology. J. Microelectromech. Syst. 12(6), 880–891 (2003)
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Ekwińska, M.A., Janczyk, G., Bieniek, T., Grabiec, P., Zając, J., Wąsowski, J. (2017). Design—Simulation—Optimization Environment of Specialized MEMS. In: Jabłoński, R., Szewczyk, R. (eds) Recent Global Research and Education: Technological Challenges. Advances in Intelligent Systems and Computing, vol 519. Springer, Cham. https://doi.org/10.1007/978-3-319-46490-9_65
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DOI: https://doi.org/10.1007/978-3-319-46490-9_65
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