Abstract
ZnO thin films devised by RF magnetron sputtering were studied for monitoring volatile organic compounds (VOCs) such as acetone, ammonia and ethanol gases in the concentration range of 50–250 ppm under room temperature. The fabricated films were inspected by X-ray diffractometer (XRD), UV-Vis spectrometer, energy dispersive X-ray spectrometer (EDS) and scanning electron microscope (SEM). The XRD results stipulate that the films having wurtzite structure with (0 0 2) preferential orientation and the grain size of the film were calculated as 12.39 nm using Scherrer’s formula. The UV-Vis spectrum showed that the film having 95 % of the transparency in the visible region. The band gap of the film was calculated from Tauc’s plot and was found to be around 3.2 eV. The EDS spectrum affirms the occupancy of Zn and O elements in the ZnO film. The microscopic structure of the film was examined by SEM and the average grain size was estimated as ~13 nm which is having acceptable harmony with XRD results. The sensor response was appraised by change in electrical resistance of the film under the atmospheric medium of VOC gases at room temperature. The sensor gives a better response (~5.2) towards acetone compared with other vapours.
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References
Franciosoa, L., Forleo, A., Taurinoa, A.M., Siciliano, P., Lorenzelli, L., Guamier, V.: Linear temperature micro hotplate gas sensor array for automotive cabin air quality monitoring. Sens. Actuators, B 134, 660–665 (2008)
Michael, L.B., Denise, W.: Henshel Diane: An investigation of the relationship between air emissions of volatile organic compounds and the incidence of cancer in Indiana counties. Environ. Res. 100, 242–254 (2006)
Baptise, S.J., Franck, B., Michel, F., Helene, N.M.: A selective gas detection micro-device for monitoring the volatile organic compounds pollution. Sens. Actuators, B 119, 227–233 (2006)
Yen, L.C., Ming, C.C., Hsiang, W.Y., Hua, M.R.: A self-heating gas sensor with integrated NiO thin film for formaldehyde detection. Sens. Actuators, B 122, 503–510 (2007)
Rella, R., Spadavecchia, J., Manena, M.G., Capone, S., Taurino, A., Martino, M.: Acetone and ethanol solid-state gas sensor based TiO2 nanoparticles thin film deposited by matrix assisted pulsed laser evaporation. Sens. Actuators, B 127, 426–431 (2007)
Huang, J., Wan, Q.: Gas sensors based on semiconducting metal oxide one-dimensional nanostructures. Sensors 12, 9903–9924 (2009)
Ozgur, U., Alivov, Y., I., Liu, C., Teke, A., Reshchikov, M.A., Dogan, S., Avurutin, V., Cho, S., Morkoc, H.: A comprehensive review of ZnO materials and devices. J. Appl. Phys. 98, 041301 (2005)
Supab, C., Niyom, H., Pongri, M., Nikom, M.: Zinc oxide nanobelts by RF sputtering for ethanol sensor. Physica E 39, 53–56 (2007)
Paraguay, D.F., Miki-Yoshida, M., Morales, J., Solis, J.: Influence of Al, In, Cu, Fe and Sn dopants on the response of thin film ZnO gas sensor to ethanol vapor. Thin Solid Films 373, 137–140 (2000)
Jen, H.T., Liang, H.C.: Fabrication of gas sensing devices with ZnO nanostructure by low-temperature oxidation of Zinc particles. Sens. Actuators B 131, 572–576 (2008)
Al-Hardan, N.H., Abdulla, M.J., Abdul Aziz, A.: A sensing mechanism of hydrogen gas sensor based on RF sputtered ZnO thin films. Int. J. Hydrogen Energy 35, 4428–4434 (2010)
Kripal, R., Gupta, A.K., Srivastava, R.K., Mishra, S.K.: Photoconductivity and photoluminescence of ZnO nanoparticles synthesized via co-precipitation method, Spectrochimi. Acta Part A 79, 1605–1612 (2011)
Acknowledgements
The authors convey their sincere gratitude to Department of Science and Technology (DST), New Delhi, India for providing the financial support through FIST (Fund for Improvement of S&T Infrastructure in Higher Education Institution) project [SR/FST/ETI-015/2011].
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Narasimman, S., Balakrishnan, L., Meher, S.R., Sivacoumar, R., Rufus, E., Alex, Z.C. (2017). Fabrication of ZnO Thin Film Based VOC Sensor. In: Ebenezar, J. (eds) Recent Trends in Materials Science and Applications. Springer Proceedings in Physics, vol 189. Springer, Cham. https://doi.org/10.1007/978-3-319-44890-9_39
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DOI: https://doi.org/10.1007/978-3-319-44890-9_39
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