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Atomic Processes of Pulsed Laser Deposition During Growth of Alkaline Earth Oxide Thin Films

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Correlated Functional Oxides

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Abstract

Pulsed laser deposition (PLD) is one of the most powerful techniques to deposit thin films of multielemental materials such as electronic functional oxides. The PLD is a quite simple and convenient technique, so it is easy to prepare a variety of thin films. However, the physics beyond process has not been fully understood. The comprehension of PLD physics is expected to be fundamental to lead the improvement of thin films quality. This chapter investigates the physical processes of PLD, describing unique photochemical reaction during laser ablation , then discusses how conditions of the laser affect the ablation process for the very simple case of the ablation of alkaline earth metals. In this part, a unique photochemical process is shown. In the latter part of the chapter, it is introduced a technique based on in situ reflection of high-energy electron diffraction, to monitor the PLD process in real time. We consider that the studies reported in this chapter will be a first step enabling the PLD fabricating “tailored” oxide heterostructures and playing a key role in new physics.

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Acknowledgments

The author thanks Prof. T. Kawai, Dr. M. Kanai, Prof. G. Szabo and Prof. J. J. Dubowski for fruitful collaboration.

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Authors and Affiliations

  1. Faculty of Biology-Oriented Science and Technology, Kindai University, Kinokawa, Wakayama, Japan

    Hiroaki Nishikawa

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  1. Hiroaki Nishikawa
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Correspondence to Hiroaki Nishikawa .

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Editors and Affiliations

  1. Faculty of Biology-Oriented Science and Technology, Kindai University, Kinokawa, Wakayama, Japan

    Hiroaki Nishikawa

  2. College of Science and Technology, Nihon University, Funabashi, Chiba, Japan

    Nobuyuki Iwata

  3. Tsu, Mie, Japan

    Tamio Endo

  4. Materials Science and Engineering , University of California, Davis, Davis, California, USA

    Yayoi Takamura

  5. Korea Institute of Materials Science, Seongsan, Changwon, Gyeongnam, Korea (Republic of)

    Gun-Hwan Lee

  6. College of Design and Manufacturing Technology, Research Center for Environmentally Friendly Materials Engineering, Muroran Institute of Technology, Muroran, Hokkaido, Japan

    Paolo Mele

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Nishikawa, H. (2017). Atomic Processes of Pulsed Laser Deposition During Growth of Alkaline Earth Oxide Thin Films. In: Nishikawa, H., Iwata, N., Endo, T., Takamura, Y., Lee, GH., Mele, P. (eds) Correlated Functional Oxides. Springer, Cham. https://doi.org/10.1007/978-3-319-43779-8_9

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