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The RF Plasma Torches

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Theory of Low-Temperature Plasma Physics

Part of the book series: Springer Series on Atomic, Optical, and Plasma Physics ((SSAOPP,volume 95))

Abstract

The basis of the physical processes in the RF plasma torches and parameters of the RF plasma torches will be considered in this chapter. They are based on the two models—equilibrium and nonequilibrium plasmas, as well as the experimental results. A large number of the results presented in this chapter show the most power of simulation methods implemented as a great tool of researchers. The obtained results can be used to study the physical processes in the RF discharge, establishing communication between the inside of the discharge parameters and external parameters of plasma torches and generators, determine the number and locations of measurement of various parameters of the discharge, and for the solution problem of the control of the RF plasma torches.

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  1. Laboratory of Plasma Physics, National Research University “MPEI”, Moscow, Russia

    Shi Nguyen-Kuok

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  1. Shi Nguyen-Kuok
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Correspondence to Shi Nguyen-Kuok .

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Nguyen-Kuok, S. (2017). The RF Plasma Torches. In: Theory of Low-Temperature Plasma Physics. Springer Series on Atomic, Optical, and Plasma Physics, vol 95. Springer, Cham. https://doi.org/10.1007/978-3-319-43721-7_7

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